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Volumn , Issue , 1988, Pages 1-4
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LIGA process: sensor construction techniques via X-ray lithography.
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTROFORMING;
LITHOGRAPHY;
METALS AND ALLOYS -- PROCESSING;
PLASTICS -- PROCESSING;
X-RAYS -- APPLICATIONS;
LIGA PROCESS;
MICROSTRUCTURES;
MOLDING;
X-RAY LITHOGRAPHY;
SENSORS;
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EID: 0024133520
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (44)
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References (6)
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