LIGA process: sensor construction techniques via X-ray lithography.

Volumn , Issue , 1988, Pages 1-4

  Ehrfeld, W ^a   Gotz, F ^a   Munchmeyer, D ^a   Schelb, W ^a   Schmidt, D ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROFORMING; LITHOGRAPHY; METALS AND ALLOYS -- PROCESSING; PLASTICS -- PROCESSING; X-RAYS -- APPLICATIONS;

LIGA PROCESS; MICROSTRUCTURES; MOLDING; X-RAY LITHOGRAPHY;

SENSORS;

EID: 0024133520     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)