Fabrication of microgratings on PMMA plate and curved surface by using copper mesh as X-ray lithography mask

Microsystem Technologies

Volumn 13, Issue 3-4, 2007, Pages 227-230

  Li, Yigui ^a,b   Sugiyama, Susumu ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

^b SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; DIFFRACTION GRATINGS; LENSES; MASKS; X RAY LITHOGRAPHY;

COPPER MESH; CYLINDER LENS SURFACES; MICROGRATINGS;

POLYMETHYL METHACRYLATES;

EID: 33845770868     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0196-x     Document Type: Article

References (7)

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