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Journal of Micromechanics and Microengineering

Volumn 15, Issue 6, 2005, Pages 1242-1248

Ultra-deep x-ray lithography of densely packed SU-8 features: I. An SU-8 casting procedure to obtain uniform solvent content with accompanying experimental results

(3) Becnel, Charles a Desta, Yohannes b Kelly, Kevin c

a International Mezzo Technologies Inc (United States)

b LOUISIANA STATE UNIVERSITY (United States)

c Louisiana State University (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CASTING; CROSSLINKING; DIFFUSION; MICROELECTROMECHANICAL DEVICES; POLYVINYL CHLORIDES; SOLVENTS; THERMOGRAVIMETRIC ANALYSIS; X RAY LITHOGRAPHY;

DRY CHIP CASTING METHOD; PHOTO ACID GENERATORS (PAG); SOLVENT CONTENT; ULTRA-DEEP X-RAY LITHOGRAPHY;

PHOTORESISTS;

CASTING; CROSS LINKING; DIFFUSION; GRAVIMETRY; LITHOGRAPHY; POLYVINYL CHLORIDE; THERMAL ANALYSIS; X RAYS;

EID: 18744378268 PISSN: 09601317 EISSN: None Source Type: Journal
DOI: 10.1088/0960-1317/15/6/015 Document Type: Article

Times cited : (30)

References (7)

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- Guerin, L.J.¹

2
- 0007897903
- SU-8 as resist material for deep x-ray lithography
- 10.1007/s005420000054 0946-7076
- Cremers C, Bouamrane F, Singleton L and Schenk R 2001 SU-8 as resist material for deep x-ray lithography Microsyst. Technol. 7 11-6
- (2001) Microsyst. Technol. , vol.7 , Issue.1 , pp. 11-16
- Cremers, C.¹ Bouamrane, F.² Singleton, L.³ Schenk, R.⁴

3
- 0038694405
- SU-8 based deep x-ray lithography/LIGA
- 10.1117/12.478246 0277-786X
- Jian L, Desta Y M, Aigeldinger G, Bednarzik M, Loechel B and Goettert J 2003 SU-8 based deep x-ray lithography/LIGA Proc. SPIE 4979 394-401
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- Jian, L.¹ Desta, Y.M.² Aigeldinger, G.³ Bednarzik, M.⁴ Loechel, B.⁵ Goettert, J.⁶

4
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- Tapered LIGA HARMs
- 0960-1317 303
- Turner R, Desta Y, Kelly K, Zhang J, Geiger E, Cortez S and Mancini D 2003 Tapered LIGA HARMs J. Micromech. Microeng. 13 367-72
- (2003) J. Micromech. Microeng. , vol.13 , Issue.3 , pp. 367-372
- Turner, R.¹ Desta, Y.² Kelly, K.³ Zhang, J.⁴ Geiger, E.⁵ Cortez, S.⁶ Mancini, D.⁷

5
- 18744411149
- Fabrication and preliminary testing of X-ray lenses in thick SU-8 resist layers
- Nazmov V, Reznikova E, Snigirev A, Snigireva I, Mohr J, Achenbach S and Saile V 2003 Fabrication and preliminary testing of X-ray lenses in thick SU-8 resist layers Fifth Biennial Workshop on High Aspect Ratio Micro-Structure Technologies (Monterey, CA 15-17 June)
- (2003) Fifth Biennial Workshop on High Aspect Ratio Micro-Structure Technologies
- Nazmov, V.¹ Reznikova, E.² Snigirev, A.³ Snigireva, I.⁴ Mohr, J.⁵ Achenbach, S.⁶ Saile, V.⁷

6
- 0036883216
- Acid catalyst mobility in resist resin
- 10.1116/1.1523027 0734-211X B
- Stewart M, Tran H, Schmid G, Stachowiak T, Becker D and Wilson C 2002 Acid catalyst mobility in resist resin J. Vac. Sci. Technol. B 20 2946-52
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7
- 18744371856
- Ultra deep x-ray lithography of densely packed SU-8 features: II. Process performance as a function of dose, feature height, and post exposure bake temperature
- 0960-1317
- Becnel C, Desta Y and Kelly K Ultra deep x-ray lithography of densely packed SU-8 features: II. Process performance as a function of dose, feature height, and post exposure bake temperature J. Micromech. Microeng. 15 1249-59
- J. Micromech. Microeng. , vol.15 , pp. 1249-1259
- Becnel, C.¹ Desta, Y.² Kelly, K.³

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