Formation of nanopores in a SiN/SiO 2 membrane with an electron beam

Applied Physics Letters

Volumn 87, Issue 11, 2005, Pages

  Wu, Meng Yue ^a   Krapf, Diego ^a   Zandbergen, Mathijs ^a   Zandbergen, Henny ^a   Batson, Philip E ^b  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

NANPORES; WEDGE;

ELECTRON BEAMS; ELECTRON ENERGY LOSS SPECTROSCOPY; NANOSTRUCTURED MATERIALS; POROUS MATERIALS; SILICA;

SILICON NITRIDE;

EID: 24944584120     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2043247     Document Type: Article

References (17)

1. S. Seraphin, D. Zhou, and J. Jiao, J. Mater. Res. 8, 1895 (1993).
2. C. J. Humphreys, T. J. Bullough, R. W. Devenish, D. M. Maher, and P. S. Turner, Scanning Microsc. Suppl. 4, 185 (1990).
3. G. S. Chen, C. B. Boothroyd, and C. J. Humphreys, Philos. Mag. A 78, 491 (1998).
4. A. J. Storm, J. H. Chen, X. S. Ling, H. W. Zandbergen, and C. Dekker, Nat. Mater. 2, 537 (2003).
5. A. J. Storm, C. Storm, J. H. Chen, H. W. Zandbergen, J. F. Joanny, and C. Dekker, Nano Lett. 5, 1193 (2005).
6. S. M. Bezrukov, I. Vodyanov, and V. A. Parsegian, Nature (London) 370, 279 (1994).
7. A. Meller, L. Nivon, and D. Branton, Phys. Rev. Lett. 86, 3435 (2001).
8. W. Vercoutere, S. Winters-Hilt, H. Olsen, D. Deamer, D. Haussler, and M. Akeson, Nat. Biotechnol. 19, 248 (2001).
9. J. J. Kasianowicz, E. Brandin, D. Branton, and D. W. Deamer, Proc. Natl. Acad. Sci. U.S.A. 93, 13770 (1996).
10. J. Li, D. Stein, C. McMullan, D. Branton, M. J. Aziz, and J. A. Golovchenko, Nature (London) 412, 166 (2001).
11. J. Li, M. Gershow, D. Stein, E. Brandin, and J. A. Golovchenko, Nat. Mater. 2, 611 (2003).
12. R. L. Fleischer, P. B. Price, and R. M. Walker, Nuclear Tracks in Solids: Principles and Applications (Univeristy of California Press, Berkeley, 1975).
13. P. Y. Apel, Y. E. Korchev, Z. Siwy, R. Spohr, and M. Yoshida, Nucl. Instrum. Methods Phys. Res. B 184, 337 (2001).
14. Z. Siwy, D. Dobrev, R. Neumann, C. Trautmann, and K. Voss, Appl. Phys. A: Mater. Sci. Process. 76, 781 (2003).
15. K. S. Ralls, R. A. Buhrman, and R. C. Tiberio, Appl. Phys. Lett. 55, 2459 (1989).
16. S. Lazar, G. A. Botton, M.-Y. Wu, F. D. Tichelaar, and H. W. Zandbergen, Ultramicroscopy 96, 535 (2003).
17. L. Dori, J. Bruley, D. J. DiMaria, P. E. Batson, J. Tornello, and M. J. Arienzo, J. Appl. Phys. 69, 2317 (1991).