MODULIGA: The LIGA process as a modular production method-current standardization status in Germany

Microsystem Technologies

Volumn 11, Issue 4-5, 2005, Pages 240-245

  Hahn, L ^a   Meyer, P ^a   Bade, K ^a   Hein, H ^a   Schulz, J ^a   Lochel B ^b   Scheunemann, H U ^b   Schondelmaier, D ^b   Singleton, L ^c  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^b HAHN MEITNER INSTITUT   (Germany)

^c INSTITUT FÜR MIKROTECHNIK MAINZ GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ELECTROPLATING; HARDNESS; MASKS; MICROSTRUCTURE; PLASTICS; PLASTICS MOLDING; POLYMETHYL METHACRYLATES; STANDARDIZATION; STRESSES; SUBSTRATES; X RAYS;

LIGA PROCESS; MOLDING TOOLS; RESIST MOLDS; RESIST THICKNESS;

X RAY LITHOGRAPHY;

EID: 21044442381     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-004-0368-5     Document Type: Conference Paper

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