Direct LIGA service for prototyping: Status report

Microsystem Technologies

Volumn 13, Issue 3-4, 2007, Pages 327-334

  Loechel, B ^a   Goettert, J ^b   Desta, Y M ^b  

^a HAHN MEITNER INSTITUT   (Germany)

^b LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; ELECTROPLATING; FLUIDIC DEVICES; LITHOGRAPHY; PRECISION ENGINEERING;

COMPLEX DEVICES; HIGH-VOLUME PRODUCTION;

MICROOPTICS;

EID: 33845760072     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0241-9     Document Type: Article

References (7)

1. Hruby J (ed) Proceedings HARMST 2003, Monterey, June 2003; copies of the proceedings can be requested from the editor (jhruby@SANDIA.gov) or the author of this paper (Jost Goettert, jost@LSU.edu)
2. Jian L, Desta YM, Aigeldinger G, Bednarzik M, Loechel B, Goettert J (2003) SU-8 based deep X-ray lithography/LIGA, Proc SPIE 4979:394-401
3. Kwon TH (ed) Proceedings HARMST 2005, Gyeongju, June 2005; copies of the proceedings can be requested from the editor (thkwon@postech.ac.kr)
4. Oh HS et al (2005) In: Proceedings HARMST 2005, Gyeongju, June pp 72-73
5. Turner R, Desta Y, Kelly K, Zhang J, Geiger E, Cortez S, Mancini D (2003) Tapered LIGA HARMs J Micromech Microeng 13:367-372
6. Wang L, Desta YM, Goettert J, Ling Z, Kong JR, Aristone F, Jin Y, Christenson TR, Bradshaw K (2003) High resolution X-ray masks for high aspect ratio microelectromechanical systems (HARMS)Proc SPIE 4979:508-513
7. 3-particles filled SU-8 X-ray resist for patterning microstructures. Diploma Thesis, University Freiburg, Fall 2002