LiGA research and service at CAMD

Journal of Physics: Conference Series

Volumn 34, Issue 1, 2006, Pages 912-918

  Goettert, Jost ^a   Datta, Proyag ^a   Desta, Yohannes ^a   Jin, Yoonyoung ^a   Ling, Zhong Geng ^a   Singh, Varshni ^a  

^a LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33744532247     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/34/1/151     Document Type: Article

References (21)

1. Proceeding HARMST 2005, Geongju, South Korea, June 2005 Many of the abstracts included in the proceedings will be published as reviewed papers in Microsystems Technologies in the near future
2. Webpage Mezzo International http://www.mezzotech.biz/
3. Webpage Micromotion http://www.mikrogetriebe.de/sites/english/about-us. html
4. Webpage HT Micro http://www.htmicro.com/
5. Aigeldinger, G 2001 Implementation of an Ultra Deep X-ray Lithography System at CAMD PhD Thesis University Freiburg
6. Jian L, Desta Y M, Aigeldinger G, Bednarzik M, Goettert J, Loechel B, Jin Y, Singh V, Ahrens G, Gruetzner G, Ruhmann R, Degen R 2003 SU-8 based deep x-ray lithography/LIGA Proc. SPIE 4979 394-401
7. Becnel C, Desta Y and Kelly K 2005 Ultra-deep x-ray lithography of densely packed SU-8 features: I&II. An SU-8 casting procedure to obtain uniform solvent content with accompanying experimental results J. Micromechanics Microengineering (6) 1242
8. Wang L, Desta Y M, Goettert J, Ling Z, Kong J R, Aristone F, Jin Y, Christenson T R, Bradshaw K 2003 High resolution x-ray masks for high aspect ratio microelectromechanical systems (HARMS) Proc. SPIE 4979 508-513
9. Details about beamlines and exposure spectra can be found on the CAMD webpage at http://www.camd.lsu.edu/beamlines/
10. Turner R, Y Desta, K Kelly, J Zhang, E Geiger, S Cortez, D Mancini 2003 Tapered LIGA HARMs J. Micromech. Microeng. 13 367-372
11. More details on exposure services are available from CAMD's Annual Reports on the CAMD homepage at http://www.camd.lsu.edu/
12. Webpage Jenoptik GmbH http://www.jo-mikrotechnik.com/
13. Webpage Technotrans GmbH http://www.technotrans.com/
14. Webpage IMT http://www.fzk.de/imt
15. Technology Road Map (TRM) - Towards Commercialization of Nano-composites and Polymer/Ceramic Hybrids The Faraday Plastics Partnership and HybridNet, 2005
16. Salahuddin N, Moet A, Hiltner A, Baer E 2002 Nanoscale Highly Filled Epoxy Nanocomposite European Polymer J. 38 1477-1482
17. Webpage CBM2 http://www.cbmm.lsu.edu/
18. Pease M, V Singh, Datta, O Kizilkaya, E Kornemann and J Goettert 2005 Microfluidic Labware forDeveloping Biofunctional Surface on GMR Sensor Book of Abstracts, HARMST05, June 10-13, 2005 (Gyeongju, Korea) p 94-95 June 2005, submitted for publication to Microsystem Technologies
19. Proyag Datta, Feng Xu, Sitanshu Gurung, Steven A Soper and Jost Goettert 2006 Polymeric Waveguides for Orthogonal Near Surface Fluorescent Excitation Microfluidics, BioMEMS, and Medical Microsystems IV, from the Proc. of SPIE vol 6112
20. Tkaczyk T S, J D Rogers, M Rahman, T C Christenson, S Gaalema, E L Dereniak, R Richards-Kortum, M R Descour 2005 Multi-modal miniature microscope: 4M Device for bioimaging applications - an overview of the system Proc. SPIE 5959 138-146
21. Rogers J D, A Kärkkäinen, T S Tkaczyk, J Rantala and M R Descour 2004 Realization of refractive microoptics through grayscale lithographi patterning of photosensitive hybrid glass Opt. Express 12 1294-1303 http://www.opticsinfobase.org/abstarct.cfm?URICombining double low lineoe-12-7-1294