Ensuring repeatability in LIGA mold insert fabrication

Microsystem Technologies

Volumn 10, Issue 5, 2004, Pages 419-422

  Schulz, J ^a   Bade, K ^a   Guttmann, M ^a   Hahn, L ^a   Janssen, A ^a   Kohler U ^a   Meyer, P ^a   Winkler, F ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMOTION; MICROSYSTEM TECHNOLOGY; MICROSYSTEMS FABRICATION;

CERAMIC MATERIALS; ELECTROFORMING; MECHANICAL DRIVES; MOLDS; RELIABILITY; STANDARDIZATION; STRESS ANALYSIS; SURFACE ROUGHNESS;

X RAY LITHOGRAPHY;

EID: 4644343705     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-004-0424-1     Document Type: Conference Paper

References (10)

1. Becker EW; Ehrfeld W; Hagmann P; Maner A; Munchmeyer D (1986) Fabrication of microstructures with high aspect ratio and great structural heights by synchrotron radiation lithography, galvanoformung and plastic molding (LIGA process). Microelectronic Eng 4(1): 35-36
2. Chung SJ; Hein H; Mohr J; Pantenburg FJ; Schulz J; Wallrabe U (2000) LIGA technology today and its industrial applications. Proc. SPIE 4194 (2000)
3. Pfeiffer K; Micro resist technologies, Berlin, Germany, private communication
4. Meyer P; Schulz J; Hahn L DoseSim: Microsoft-Windows graphical user interface for using synchrotron x-ray exposure and subsequent development in the LIGA process. Review of Scientific Instruments, 74, No.2, February 2003, pp. 1113-1119
5. http://www.roehm.de/de/plexiglas/index.htm1
6. Meyer P et al. (2003) MODULIGA: The LIGA Process as a Modular Production Method - Current Standardization State in Germany. Proceeding of MEMStAND, Barcelona, February, 24-26, 2003, pp. 167-178
7. Börner M; Achenbach S; Lessle E; Nazmov V; Mohr J (in preparation)
8. Meyer P; El-Kholi A; Schulz J (2002) Investigations of the development rate of irradiated PMMA microstructures in deep X-ray lithography. Microelect Eng 63(4): 319-328
9. Silicet AG Friedhofsweg 41; D-34253 Lohfelden, Germany
10. Plasma-Finish, Berliner Straße 126a, D-16303 Schwedt, Germany