Flexible one diode-one phase change memory array enabled by block copolymer self-assembly

ACS Nano

Volumn 9, Issue 4, 2015, Pages 4120-4128

  Mun, Beom Ho ^a   You, Byoung Kuk ^a   Yang, Se Ryeun ^a   Yoo, Hyeon Gyun ^a   Kim, Jong Min ^a   Park, Woon Ik ^a   Yin, You ^b   Byun, Myunghwan ^a   Jung, Yeon Sik ^a   Lee, Keon Jae ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b GUNMA UNIVERSITY   (Japan)

Author keywords

block copolymers; flexible electronics; flexible memory; one diode one resistor; phase change memory; self assembly

Indexed keywords

BLOCK COPOLYMERS; COPOLYMERS; DATA HANDLING; DIGITAL STORAGE; DIODES; FLEXIBLE ELECTRONICS; RADIO COMMUNICATION; RANDOM ACCESS STORAGE; SELF ASSEMBLY;

BLOCK COPOLYMER SELF-ASSEMBLY; EMERGING MEMORY TECHNOLOGIES; FLEXIBLE ELECTRONIC SYSTEMS; FLEXIBLE MEMORY; FUNDAMENTAL COMPONENT; PHASE CHANGE MEMORY (PCM); PHASE-CHANGE RANDOM ACCESS MEMORY; RADIO FREQUENCY COMMUNICATION;

PHASE CHANGE MEMORY;

EID: 84928948683     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/acsnano.5b00230     Document Type: Article

References (58)

1. Rogers, J. A.; Bao, Z.; Baldwin, K.; Dodabalapur, A.; Crone, B.; Raju, V. R.; Kuck, V.; Katz, H.; Amundson, K.; Ewing, J. Paper-like Electronic Displays: Large-Area Rubber-Stamped Plastic Sheets of Electronics and Microencapsulated Electrophoretic Inks Proc. Natl. Acad. Sci. U.S.A. 2001, 98, 4835-4840
2. Park, S. I.; Xiong, Y. J.; Kim, R. H.; Elvikis, P.; Meitl, M.; Kim, D. H.; Wu, J.; Yoon, J.; Yu, C. J.; Liu, Z. J. Printed Assemblies of Inorganic Light-Emitting Diodes for Deformable and Semitransparent Displays Science 2009, 325, 977-981
3. Abad, E.; Zampolli, S.; Marco, S.; Scorzoni, A.; Mazzolai, B.; Juarros, A.; Gomez, D.; Elmi, I.; Cardinali, G. C.; Gomez, J. M. Flexible Tag Microlab Development: Gas Sensors Integration in RFID Flexible Tags for Food Logistic Sens. Actuators, B 2007, 127, 2-7
4. Hwang, G. T.; Im, D.; Lee, S. E.; Lee, J.; Koo, M.; Park, S. Y.; Kim, S.; Yang, K.; Kim, S. J.; Lee, K. In Vivo Silicon-Based Flexible Radio Frequency Integrated Circuits Monolithically Encapsulated with Biocompatible Liquid Crystal Polymers ACS Nano 2013, 7, 4545-4553
5. Lee, S. Y.; Park, K. I.; Huh, C.; Koo, M.; Yoo, H. G.; Kim, S.; Ah, C. S.; Sung, G. Y.; Lee, K. J. Water-Resistant Flexible GaN LED on a Liquid Crystal Polymer Substrate for Implantable Biomedical Applications Nano Energy 2012, 1, 145-151
6. Kim, D. H.; Ghaffari, R.; Lu, N.; Rogers, J. A. Flexible and Stretchable Electronics for Biointegrated Devices Annu. Rev. Biomed. Eng. 2012, 14, 113-128
7. Jeong, C. K.; Park, K.-I.; Son, J. H.; Hwang, G.-T.; Lee, S. H.; Park, D. Y.; Lee, H. E.; Lee, H. K.; Byun, M.; Lee, K. J. Self-Powered Fully-Flexible Light-Emitting System Enabled by Flexible Energy Harvester Energy Environ. Sci. 2014, 7, 4035-4043
8. Koo, M.; Park, K. I.; Lee, S. H.; Suh, M.; Jeon, D. Y.; Choi, J. W.; Kang, K.; Lee, K. J. Bendable Inorganic Thin-Film Battery for Fully Flexible Electronic Systems Nano Lett. 2012, 12, 4810-4816
9. Sun, Y. G.; Rogers, J. A. Inorganic Semiconductors for Flexible Electronics Adv. Mater. 2007, 19, 1897-1916
10. Klauk, H. Plastic Electronics: Remotely Powered by Printing Nat. Mater. 2007, 6, 397-398
11. Kaltenbrunner, M.; Sekitani, T.; Reeder, J.; Yokota, T.; Kuribara, K.; Tokuhara, T.; Drack, M.; Schwodiauer, R.; Graz, I.; Bauer-Gogonea, S. An Ultra-Lightweight Design for Imperceptible Plastic Electronics Nature 2013, 499, 458-463
12. Cheng, C. H.; Yeh, F. S.; Chin, A. Low-Power High-Performance Non-Volatile Memory on a Flexible Substrate with Excellent Endurance Adv. Mater. 2011, 23, 902-905
13. Han, S. T.; Zhou, Y.; Roy, V. A. L. Towards the Development of Flexible Non-Volatile Memories Adv. Mater. 2013, 25, 5425-5449
14. Rho, J.; Kim, S. J.; Heo, W.; Lee, N. E.; Lee, H. S.; Ahn, J. H. PbZrxTi1-xO3 Ferroelectric Thin-Film Capacitors for Flexible Nonvolatile Memory Applications IEEE Electron Device Lett. 2010, 31, 1017-1019
15. Sekitani, T.; Yokota, T.; Zschieschang, U.; Klauk, H.; Bauer, S.; Takeuchi, K.; Takamiya, M.; Sakurai, T.; Someya, T. Organic Nonvolatile Memory Transistors for Flexible Sensor Arrays Science 2009, 326, 1516-1519
16. Cassinerio, M.; Ciocchini, N.; Ielmini, D. Logic Computation in Phase Change Materials by Threshold and Memory Switching Adv. Mater. 2013, 25, 5975-5980
17. Lu, Y. G.; Song, S. N.; Shen, X.; Wang, G. X.; Wu, L. C.; Song, Z. T.; Liu, B.; Dai, S. X. Phase Change Characteristics of Sb-Rich Ga-Sb-Se Materials J. Alloys Compd. 2014, 586, 669-673
18. Simpson, R. E.; Fons, P.; Kolobov, A. V.; Fukaya, T.; Krbal, M.; Yagi, T.; Tominaga, J. Interfacial Phase-Change Memory Nat. Nanotechnol. 2011, 6, 501-505
19. Baliga, S. R. Programmable Metallization Cell Memory for Flexible Electronics; ProQuest: Ann Arbor, MI, 2011; pp 10-11.
20. Park, W. I.; You, B. K.; Mun, B. H.; Seo, H. K.; Lee, J. Y.; Hosaka, S.; Yin, Y.; Ross, C. A.; Lee, K. J.; Jung, Y. S. Self-Assembled Incorporation of Modulated Block Copolymer Nanostructures in Phase-Change Memory for Switching Power Reduction ACS Nano 2013, 7, 2651-2658
21. Moonen, P. F.; Yakimets, I.; Huskens, J. Fabrication of Transistors on Flexible Substrates: From Mass-Printing to High-Resolution Alternative Lithography Strategies Adv. Mater. 2012, 24, 5526-5541
22. Lencer, D.; Salinga, M.; Wuttig, M. Design Rules for Phase-Change Materials in Data Storage Applications Adv. Mater. 2011, 23, 2030-2058
23. Hong, S. H.; Jeong, J. H.; Kim, K. I.; Lee, H. High Density Phase Change Data on Flexible Substrates by Thermal Curing Type Nanoimprint Lithography Microelectron. Eng. 2011, 88, 2013-2016
24. Yoon, J. M.; Shin, D. O.; Yin, Y.; Seo, H. K.; Kim, D.; Kim, Y. I.; Jin, J. H.; Kim, Y. T.; Bae, B. S.; Kim, S. O. Fabrication of High-Density In3Sb1Te2 Phase Change Nanoarray on Glass-Fabric Reinforced Flexible Substrate Nanotechnology 2012, 23, 255301-255309
25. Bita, I.; Yang, J. K. W.; Jung, Y. S.; Ross, C. A.; Thomas, E. L.; Berggren, K. K. Graphoepitaxy of Self-Assembled Block Copolymers on Two-Dimensional Periodic Patterned Templates Science 2008, 321, 939-943
26. Chai, J.; Wang, D.; Fan, X. N.; Buriak, J. M. Assembly of Aligned Linear Metallic Patterns on Silicon Nat. Nanotechnol. 2007, 2, 500-506
27. Jung, Y. S.; Chang, J. B.; Verploegen, E.; Berggren, K. K.; Ross, C. A. A Path to Ultranarrow Patterns Using Self-Assembled Lithography Nano Lett. 2010, 10, 1000-1005
28. Jung, Y. S.; Jung, W.; Ross, C. A. Nanofabricated Concentric Ring Structures by Templated Self-Assembly of a Diblock Copolymer Nano Lett. 2008, 8, 2975-2981
29. Jung, Y. S.; Ross, C. A. Solvent-Vapor-Induced Tunability of Self-Assembled Block Copolymer Patterns Adv. Mater. 2009, 21, 2540-2545
30. Jung, Y. S.; Ross, C. A. Well-Ordered Thin-Film Nanopore Arrays Formed Using a Block-Copolymer Template Small 2009, 5, 1654-1659
31. Liang, X. G.; Jung, Y. S.; Wu, S. W.; Ismach, A.; Olynick, D. L.; Cabrini, S.; Bokor, J. Formation of Bandgap and Subbands in Graphene Nanomeshes with Sub-10 nm Ribbon Width Fabricated via Nanoimprint Lithography Nano Lett. 2010, 10, 2454-2460
32. Park, W. I.; Yoon, J. M.; Park, M.; Lee, J.; Kim, S. K.; Jeong, J. W.; Kim, K.; Jeong, H. Y.; Jeon, S.; No, K. S. Self-Assembly-Induced Formation of High-Density Silicon Oxide Memristor Nanostructures on Graphene and Metal Electrodes Nano Lett. 2012, 12, 1235-1240
33. Black, C. T.; Ruiz, R.; Breyta, G.; Cheng, J. Y.; Colburn, M. E.; Guarini, K. W.; Kim, H. C.; Zhang, Y. Polymer Self Assembly in Semiconductor Microelectronics IBM J. Res. Dev. 2007, 51, 605-633
34. Derbyshire, K. ITRS 2010: A More-than-Moore Roadmap? Solid State Technol. 2011, 54, 7-7
35. Thurn-Albrecht, T.; Schotter, J.; Kastle, C. A.; Emley, N.; Shibauchi, T.; Krusin-Elbaum, L.; Guarini, K.; Black, C. T.; Tuominen, M. T.; Russell, T. P. Ultrahigh-Density Nanowire Arrays Grown in Self-Assembled Diblock Copolymer Templates Science 2000, 290, 2126-2129
36. Park, W. I.; Kim, J. M.; Jeong, J. W.; Jung, Y. S. Deep-Nanoscale Pattern Engineering by Immersion-Induced Self-Assembly ACS Nano 2014, 8, 10009-10018
37. Singh, G.; Batra, S.; Zhang, R.; Yuan, H. Y.; Yager, K. G.; Cakmak, M.; Berry, B.; Karim, A. Large-Scale Roll-to-Roll Fabrication of Vertically Oriented Block Copolymer Thin Films ACS Nano 2013, 7, 5291-5299
38. Onses, M. S.; Song, C.; Williamson, L.; Sutanto, E.; Ferreira, P. M.; Alleyne, A. G.; Nealey, P. F.; Ahn, H.; Rogers, J. A. Hierarchical Patterns of Three-Dimensional Block-Copolymer Films Formed by Electrohydrodynamic Jet Printing and Self-Assembly Nat. Nanotechnol. 2013, 8, 667-675
39. Ji, Y.; Zeigler, D. F.; Lee, D. S.; Choi, H.; Jen, A. K. Y.; Ko, H. C.; Kim, T. W. Flexible and Twistable Non-Volatile Memory Cell Array with All-Organic One Diode-One Resistor Architecture Nat. Commun. 2013, 4, 2707-2714
40. Kang, B. S.; Ahn, S. E.; Lee, M. J.; Steftinovich, G.; Kim, K. H.; Xianyu, W. X.; Lee, C. B.; Park, Y.; Baek, I. G.; Park, B. H. High-Current-Density CuO(x)/ZnO(x) Thin-Film Diodes for Cross-Point Memory Applications Adv. Mater. 2008, 20, 3066-3069
41. Kinoshita, K.; Tsunoda, K.; Sato, Y.; Noshiro, H.; Yagaki, S.; Aoki, M.; Sugiyama, Y. Reduction in the Reset Current in a Resistive Random Access Memory Consisting of NiO(x) Brought about by Reducing a Parasitic Capacitance Appl. Phys. Lett. 2008, 93, 033506
42. Ha, T. J.; Shin, S.; Kim, H. K.; Hong, M. H.; Park, C. S.; Cho, H. H.; Choi, D. J.; Park, H. H. Use of Ordered Mesoporous SiO2 as Protection against Thermal Disturbance in Phase-Change Memory. Appl. Phys. Lett. 2013, 102.
43. Jung, Y. S.; Ross, C. A. Orientation-Controlled Self-Assembled Nanolithography Using a Polystyrene-Polydimethylsiloxane Block Copolymer Nano Lett. 2007, 7, 2046-2050
44. Nomoto, K. Bendable, Rollable and Printed Displays, Presented in the 5th International Conference on Flexible and Printed Electronics, Beijing, China, October 21-23, 2014.
45. Loke, D.; Lee, T. H.; Wang, W. J.; Shi, L. P.; Zhao, R.; Yeo, Y. C.; Chong, T. C.; Elliott, S. R. Breaking the Speed Limits of Phase-Change Memory Science 2012, 336, 1566-1569
46. Chong, T. C.; Shi, L. P.; Zhao, R.; Tan, P. K.; Li, J. M.; Lee, H. K.; Miao, X. S.; Du, A. Y.; Tung, C. H. Phase Change Random Access Memory Cell with Superlattice-Like Structure Appl. Phys. Lett. 2006, 88, 122114
47. Lankhorst, M. H. R.; Ketelaars, B. W. S. M. M.; Wolters, R. A. M. Low-Cost and Nanoscale Non-Volatile Memory Concept for Future Silicon Chips Nat. Mater. 2005, 4, 347-352
48. Burr, G. W.; Breitwisch, M. J.; Franceschini, M.; Garetto, D.; Gopalakrishnan, K.; Jackson, B.; Kurdi, B.; Lam, C.; Lastras, L. A.; Padilla, A. Phase Change Memory Technology J. Vac. Sci. Technol., B 2010, 28, 223-262
49. Yin, Y.; Hosaka, S.; Park, W. I.; Jung, Y. S.; Lee, K. J.; You, B. K.; Liu, Y.; Yu, Q. Current Density Enhancement Nano-Contact Phase-Change Memory for Low Writing Current Appl. Phys. Lett. 2013, 103, 033116
50. Incropera, F. P.; Dewitt, D. P. Fundamentals of Heat and Mass Transfer; John Wiley & Sons: New York, 1996; p 886.
51. Lee, K. S.; Yoo, D. H.; Han, J. J.; Hyung, Y. W.; Kim, S. S.; Kang, C. J.; Jeong, H. S.; Moon, J. T.; Park, H.; Jeong, H. Selective Epitaxial Growth of Silicon for Vertical Diode Application Jpn. J. Appl. Phys. 2010, 49, 08JF03-1-08JF03-4
52. Wong, H. S. P.; Raoux, S.; Kim, S.; Liang, J. L.; Reifenberg, J. P.; Rajendran, B.; Asheghi, M.; Goodson, K. E. Phase Change Memory Proc. IEEE 2010, 98, 2201-2227
53. Oh, J. H.; Park, J. H.; Lim, Y. S.; Lim, H. S.; Oh, Y. T.; Kim, J. S.; Shin, J. M.; Song, Y. J.; Ryoo, K. C.; Lim, D. W. Full Integration of Highly Manufacturable 512Mb PRAM Based on 90nm Technology Int. Electron Devices Meet. 2006, 1-4
54. Waser, R.; Dittmann, R.; Staikov, G.; Szot, K. Redox-Based Resistive Switching Memories Nanoionic Mechanisms, Prospects, and Challenges Adv. Mater. 2009, 21, 2632-2663
55. Bower, C. A.; Menard, E.; Bonafede, S.; Hamer, J. W. Active-Matrix OLED Display Backplanes Using Transfer-Printed Microscale Integrated Circuits IEEE Electron. Compon. Technol. Conf. 2010, 1339-1343
56. Ahn, J. H.; Kim, H. S.; Lee, K. J.; Jeon, S.; Kang, S. J.; Sun, Y. G.; Nuzzo, R. G.; Rogers, J. A. Heterogeneous Three-Dimensional Electronics by Use of Printed Semiconductor Nanomaterials Science 2006, 314, 1754-1757
57. Park, S. I.; Le, A. P.; Wu, J. A.; Huang, Y. G.; Li, X. L.; Rogers, J. A. Light Emission Characteristics and Mechanics of Foldable Inorganic Light-Emitting Diodes Adv. Mater. 2010, 22, 3062-3066
58. Choi, Y.; Lee, Y. K. Elastic Modulus of Amorphous Ge2Sb2Te5 Thin Film Measured by Uniaxial Microtensile Test Electron. Mater. Lett. 2010, 6, 23-26