SCOPUS 정보 검색 플랫폼

Microelectronic Engineering

Volumn 88, Issue 8, 2011, Pages 2013-2016

High density phase change data on flexible substrates by thermal curing type nanoimprint lithography

(4) Hong, Sung Hoon a Jeong, Jun Ho b Kim, Kang In a Lee, Heon a

a Korea University (South Korea)

b Korea Institute of Machine and Materials (South Korea)

Author keywords

Flexible nano device; Nanoimprint lithography; Phase change memory; Phase change nano pillar device; Tera bit record

Indexed keywords

CONDUCTIVE ATOMIC FORCE MICROSCOPY; DATA DENSITY; ELECTRICAL PROPERTY; ELECTRICAL SIGNAL; FLEXIBLE SUBSTRATE; HIGH THROUGHPUT; HIGH-DENSITY PHASE; LOW TEMPERATURES; NANO DEVICE; NANO-IMPRINT; PHASE CHANGE; STAINLESS STEEL PLATE; TERA-BIT RECORD; THERMAL CURING;

ATOMIC FORCE MICROSCOPY; CURING; ELECTRIC PROPERTIES; ETHYLENE; NANOIMPRINT LITHOGRAPHY; POLYETHYLENE TEREPHTHALATES; POLYIMIDES; STAINLESS STEEL; SUBSTRATES;

PHASE CHANGE MEMORY;

EID: 79960059347 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2011.01.057 Document Type: Conference Paper

Times cited : (12)

References (19)

1
- 33644525617
- L. Zhou, A. Wanga, S.C. Wu, J. Sun, S. Park, and T.N. Jackson Appl. Phys. Lett. 88 2006 083502
- (2006) Appl. Phys. Lett. , vol.88 , pp. 083502
- Zhou, L.¹ Wanga, A.² Wu, S.C.³ Sun, J.⁴ Park, S.⁵ Jackson, T.N.⁶

2
- 33748992598
- A.L. Briseno, R.J. Tseng, M.-M. Ling, E.H.L. Falcao, Y. Yang, F. Wudl, and Z. Bao Adv. Mat. 18 2006 17 2320
- (2006) Adv. Mat. , vol.18 , pp. 17-2320
- Briseno, A.L.¹ Tseng, R.J.² Ling, M.-M.³ Falcao, E.H.L.⁴ Yang, Y.⁵ Wudl, F.⁶ Bao, Z.⁷

3
- 18144425545
- E. Artukovic, M. Kaempgen, D.S. Hecht, S. Roth, and G. GrUner Nano Lett. 5 4 2005 757
- (2005) Nano Lett. , vol.5 , Issue.4 , pp. 757
- Artukovic, E.¹ Kaempgen, M.² Hecht, D.S.³ Roth, S.⁴ Gruner, G.⁵

4
- 33846422774
- C. Lungenschmied, G. Dennler, H. Neugebauer, S.N. Sariciftci, M. Glatthaar, T. Meyer, and A. Meyer Sol. Energ. Mat. Sol. C 91 5 2007 379
- (2007) Sol. Energ. Mat. Sol. C , vol.91 , Issue.5 , pp. 379
- Lungenschmied, C.¹ Dennler, G.² Neugebauer, H.³ Sariciftci, S.N.⁴ Glatthaar, M.⁵ Meyer, T.⁶ Meyer, A.⁷

5
- 40449136430
- A. Nadarajah, R.C. Word, J. Meiss, and R. Konenkamp Nano Lett. 8 2 2008 534
- (2008) Nano Lett. , vol.8 , Issue.2 , pp. 534
- Nadarajah, A.¹ Word, R.C.² Meiss, J.³ Konenkamp, R.⁴

6
- 34547752436
- S.H. Ko, H. Pan, C.P. Grigoropoulos, C.K. Luscombe, K.M.J. Frechet, and D. Poulikakos Nanotechnology 18 2007 345202
- (2007) Nanotechnology , vol.18 , pp. 345202
- Ko, S.H.¹ Pan, H.² Grigoropoulos, C.P.³ Luscombe, C.K.⁴ Frechet, K.M.J.⁵ Poulikakos, D.⁶

7
- 33847758248
- D.R. Hines, V.W. Ballarotto, E.D. Williams, Y. Shao, and S.A. Solin J. Appl. Phys. 101 2007 024503
- (2007) J. Appl. Phys. , vol.101 , pp. 024503
- Hines, D.R.¹ Ballarotto, V.W.² Williams, E.D.³ Shao, Y.⁴ Solin, S.A.⁵

8
- 79960063351
- I. Park, S.H. Ko, H. Pan, C.P. Grigoropoulos, A.P. Pisano, J.M.J. Frechet, E.S. Lee, and J.H. Jeong Adv. Mater. 20 2008 3 489
- (2008) Adv. Mater. , vol.20 , pp. 3-489
- Park, I.¹ Ko, S.H.² Pan, H.³ Grigoropoulos, C.P.⁴ Pisano, A.P.⁵ Frechet, J.M.J.⁶ Lee, E.S.⁷ Jeong, J.H.⁸

9
- 0032472660
- T.R. Hebner, C.C. Wu, D. Marcy, M.H. Lu, and J.C. Sturm Appl. Phys. Lett. 72 1998 519
- (1998) Appl. Phys. Lett. , vol.72 , pp. 519
- Hebner, T.R.¹ Wu, C.C.² Marcy, D.³ Lu, M.H.⁴ Sturm, J.C.⁵

10
- 0142037327
- S.Y. Chou, P.R. Krauss, and P.J. Renstom Appl. Phys. Lett. 67 1995 3114
- (1995) Appl. Phys. Lett. , vol.67 , pp. 3114
- Chou, S.Y.¹ Krauss, P.R.² Renstom, P.J.³

11
- 0030570065
- S.Y. Chou, P.R. Krauss, and P.J. Renstom Science 272 1996 85
- (1996) Science , vol.272 , pp. 85
- Chou, S.Y.¹ Krauss, P.R.² Renstom, P.J.³

12
- 3242676271
- M.D. Austin, H. Ge, W. Wu, M. Li, Z. Yu, D. Wasserman, S.A. Lyon, and S.Y. Chou Appl. Phys. Lett. 84 2004 5299
- (2004) Appl. Phys. Lett. , vol.84 , pp. 5299
- Austin, M.D.¹ Ge, H.² Wu, W.³ Li, M.⁴ Yu, Z.⁵ Wasserman, D.⁶ Lyon, S.A.⁷ Chou, S.Y.⁸

13
- 0036613997
- S. Matsui, Y. Igaku, H. Ishigaki, J. Fujita, M. Ishida, Y. Ochiai, H. Namatsu, and M. Komuro Jpn. J. Appl. Phys. 41 2002 4198
- (2002) Jpn. J. Appl. Phys. , vol.41 , pp. 4198
- Matsui, S.¹ Igaku, Y.² Ishigaki, H.³ Fujita, J.⁴ Ishida, M.⁵ Ochiai, Y.⁶ Namatsu, H.⁷ Komuro, M.⁸

14
- 55049128077
- S.-H. Hong, K.-S. Han, K.-J. Byeon, H. Lee, and K.-W. Choi Jpn. J. Appl. Phys. 47 2008 3699
- (2008) Jpn. J. Appl. Phys. , vol.47 , pp. 3699
- Hong, S.-H.¹ Han, K.-S.² Byeon, K.-J.³ Lee, H.⁴ Choi, K.-W.⁵

15
- 33645672608
- H. Lee, S. Hong, and K. Yang Appl. Phys. Lett. 88 2006 143112
- (2006) Appl. Phys. Lett. , vol.88 , pp. 143112
- Lee, H.¹ Hong, S.² Yang, K.³

16
- 77955515826
- S. Chun, K.S. Han, J.H. Shin, H. Lee, and D. Kim Microelectron. Eng. 87 2010 2097
- (2010) Microelectron. Eng. , vol.87 , pp. 2097
- Chun, S.¹ Han, K.S.² Shin, J.H.³ Lee, H.⁴ Kim, D.⁵

17
- 77955510327
- S.H. Hong, B.J. Bae, H. Lee, and J.H. Jeong Microelectron. Eng. 87 2010 11 2081
- (2010) Microelectron. Eng. , vol.87 , pp. 11-2081
- Hong, S.H.¹ Bae, B.J.² Lee, H.³ Jeong, J.H.⁴

18
- 77449093103
- S.H. Hong, B.J. Bae, and H. Lee Nanotechnology 21 2010 025703
- (2010) Nanotechnology , vol.21 , pp. 025703
- Hong, S.H.¹ Bae, B.J.² Lee, H.³

19
- 68949085197
- B.J. Bae, S.H. Hong, S.Y. Hwang, J.Y. Hwang, K.Y. Yang, and H. Lee Semicond. Sci. Technol. 24 7 2009 075016
- (2009) Semicond. Sci. Technol. , vol.24 , Issue.7 , pp. 075016
- Bae, B.J.¹ Hong, S.H.² Hwang, S.Y.³ Hwang, J.Y.⁴ Yang, K.Y.⁵ Lee, H.⁶

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.