Elastic modulus of amorphous Ge2Sb2Te5 thin film measured by uniaxial microtensile test

Electronic Materials Letters

Volumn 6, Issue 1, 2010, Pages 23-26

  Choi, Yunjung ^a   Lee, Young Kook ^a  

^a Yonsei University   (South Korea)

Author keywords

Amorphous Ge2Sb2Te5 film; Microtensile test; Viscoelasticity; Young's modulus

Indexed keywords

AMORPHOUS GE2SB2TE5 FILM; BIAXIAL MODULUS; ELASTIC PROPERTIES; MICRO TENSILE TESTS; NANOINDENTATION TESTS; POLYIMIDE SUBSTRATE; RULE OF MIXTURE; UNLOADING CURVES; VISCOELASTIC RECOVERY; WAFER CURVATURE MEASUREMENT; YOUNG'S MODULUS;

ELASTIC MODULI; ELASTICITY; GERMANIUM; NANOINDENTATION; POLYIMIDES; TELLURIUM COMPOUNDS; TESTING; THIN FILMS; UNLOADING; VAPOR DEPOSITION; VISCOELASTICITY; VISCOSITY;

AMORPHOUS FILMS;

EID: 77955737756     PISSN: 17388090     EISSN: None     Source Type: Journal    
DOI: 10.3365/eml.2010.03.23     Document Type: Article

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