Fabrication of high-density In 3Sb 1Te 2 phase change nanoarray on glass-fabric reinforced flexible substrate

Nanotechnology

Volumn 23, Issue 25, 2012, Pages

  Yoon, Jong Moon ^a   Shin, Dong Ok ^a   Yin, You ^b   Seo, Hyeon Kook ^a   Kim, Daewoon ^a   Kim, Yong In ^a   Jin, Jung Ho ^a   Kim, Yong Tae ^c   Bae, Byeong Soo ^a   Kim, Sang Ouk ^a   Lee, Jeong Yong ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b GUNMA UNIVERSITY   (Japan)

^c Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AREAL DENSITIES; BLOCK COPOLYMER BLENDS; BLOCK COPOLYMER LITHOGRAPHY; BOTTOM ELECTRODES; CELL ARRAY; FLAT SURFACES; FLEXIBLE DEVICE; FLEXIBLE SUBSTRATE; HIGH-DENSITY; HYBRIMER; LOW THERMAL EXPANSION; NANO SCALE; NANOARRAYS; NANOSCALE PATTERNING; PHASE CHANGE; REINFORCED COMPOSITES; SELF-ASSEMBLED; SINGLE-STEP;

BLOCK COPOLYMERS; COMPOSITE FILMS; GLASS; LITHOGRAPHY; PHASE CHANGE MATERIALS; REINFORCEMENT; TITANIUM NITRIDE;

SUBSTRATES;

EID: 84861881593     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/23/25/255301     Document Type: Article

References (54)

1. MacDonald W A 2004 J. Mater. Chem. 14 4
2. Tsutsui T and Fujita K 2002 Adv. Mater. 14 949
3. Nadarajah A, Word R C, Meiss J and Konenkamp R 2008 Nano Lett. 8 534 (Pubitemid 351346013)
4. Artukovic E, Kaempgen M, Hecht D S, Roth S and GrUner G 2005 Nano Lett. 5 757 (Pubitemid 40609755)
5. Briseno A L, Tseng R J, Ling M-M, Falcao E H L, Yang Y, Wudl F and Bao Z 2006 Adv. Mater. 18 2320 (Pubitemid 44444428)
6. Zhou L, Wanga A, Wu S C, Sun J, Park S and Jackson T N 2006 Appl. Phys. Lett. 88 083502
7. Lungenschmied C, Dennler G, Neugebauer H, Sariciftci S N, Glatthaar M, Meyer T and Meyer A 2007 Sol. Energy Mater. Sol. Cells 91 379 (Pubitemid 46149270)
8. Abad E et al 2007 Sensors Actuators B 127 2 (Pubitemid 47503696)
9. Hebner T R, Wu C C, Marcy D, Lu M H and Sturm J C 1998 Appl. Phys. Lett. 72 519 (Pubitemid 128671226)
10. Park I, Ko S H, Pan H, Grigoropoulos C P, Pisano A P, Frechet J M J, Lee E S and Jeong J H 2008 Adv. Mater. 20 489
11. Hines D R, Ballarotto V W, Williams E D, Shao Y and Solin S A 2007 J. Appl. Phys. 101 024503 (Pubitemid 46372858)
12. Ko S H, Pan H, Grigoropoulos C P, Luscombe C K, Frechet K M J and Poulikakos D 2007 Nanotechnology 18 345202 (Pubitemid 47228436)
13. Sekitani T, Yokota T, Zschieschang U, Klauk H, Bauer S, Takeuchi K, Takamiya M, Sakurai T and Someya T 2009 Science 326 1516
14. Kim S, Jeong H Y, Kim S K, Choi S-Y and Lee K J 2011 Nano Lett. 11 5437
15. Jeong H Y et al 2010 Nano Lett. 10 4381
16. van de Goor A, Jung C, Hamdioui S and Gaydadjiev G 2010 IEEE Des. Diagn. Electron. Circuits Syst. (DDECS) 14 3827
17. Lee K H, Lee G, Lee K, Oh M S and Im S 2009 Appl. Phys. Lett. 94 093304
18. Lai S and Lowrey T 2001 IEDM Tech. Dig. 803
19. Lacaita A L 2006 Solid-State Electron. 50 24 (Pubitemid 43061373)
20. Yin Y, Sone H and Hosaka S 2006 Japan. J. Appl. Phys. 45 8600 (Pubitemid 47253109)
21. Kang D H 2008 Symp. VLSI Tech Dig. 17
22. Rao F, Song Z, Zhong M, Wu L, Feng G, Liu B, Feng S and Chen B 2007 Japan. J. Appl. Phys. 46 L25 (Pubitemid 47252484)
23. Yin Y, Sone H and Hosaka S 2007 Microelectron. Eng. 84 2901 (Pubitemid 350116283)
24. Wang C, Zhai J, Song S, Song Z, Sun M and Shen B 2011 Electrochem. Solid-State Lett. 14 H258
25. Daly-Flynn K and Strand D 2003 Japan. J. Appl. Phys. 42 795
26. Papandreou N, Pantazi A, Sebastian A, Eleftheriou E, Breitwisch M, Lam C and Pozidis H 2010 Solid-State Electron. 54 991
27. Nirschl T et al 2007 IEDM 2007 p 461
28. Yin Y, Noguchi T and Hosaka S 2011 Japan. J. Appl. Phys. 50 105201
29. Kim E T, Lee J Y and Kim Y T 2009 Phys. Status Solidi RRL 3 103
30. Kim Y I, Kim E T, Lee J Y and Kim Y T 2011 Appl. Phys. Lett. 98 091915
31. Kim Y T, Kim E T, Kim C S and Lee J Y 2011 Phys. Status Solidi RRL 5 98
32. Park M, Harrison C, Chaikin P M, Register R A and Adamson D H 1997 Science 276 1401 (Pubitemid 27235405)
33. Thurn-Albrecht T, Schotter J, Kastle G A, Emley N, Shibauchi T, Krusin-Elbaum L, Guarini K, Black C T, Tuominen M T and Russell T P 2000 Science 290 2126 (Pubitemid 32001589)
34. Kim S O, Solak H H, Stoykovich M P, Ferrier N J, de Pablo J J and Nealey P F 2003 Nature 424 411 (Pubitemid 36917485)
35. Ruiz R, Kang H, Detcheverry F A, Dobisz E, Kercher D S, Albrecht T R, de Pablo J J and Nealey P F 2008 Science 321 936
36. Bita I, Yang J K W, Jung Y S, Ross C A, Thomas E L and Berggren K K 2008 Science 321 939
37. Park S, Lee D H, Xu J, Kim B, Hong S W, Jeong U, Xu T and Russell T P 2009 Science 323 1030
38. Arora H, Du P, Tan K W, Hyun J K, Grazul J, Xin H L, Muller D A, Thompson M O and Wiesner U 2010 Science 330 214
39. Yang J K W, Jung Y S, Chang J B, Mickiewicz R A, Katz A A, Ross C A and Berggren K K 2010 Nature Nanotechnol. 5 256
40. Park S H, Shin D O, Kim B H, Yoon D K, Kim K, Lee S Y, Oh S-H, Choi S-W, Jeon S C and Kim S O 2010 Soft Matter 6 120
41. Jeong S-J, Kim J E, Moon H-S, Kim B H, Kim S M, Kim J B and Kim S O 2009 Nano Lett. 9 2300
42. Jeong S-J, Moon H-S, Shin J, Kim B H, Shin D O, Kim J Y, Lee Y-H, Kim J U and Kim S O 2010 Nano Lett. 10 3500
43. Jeong S-J, Moon H-S, Kim B H, Kim J Y, Yu J, Lee S, Lee M G, Choi H Y and Kim S O 2010 ACS Nano 4 5181
44. Cheng J Y, Sanders D P, Truong H D, Harrer S, Friz A, Holmes S, Colburn M and Hinsberg W D 2010 ACS Nano 4 4815
45. Hong A J, Liu C C, Wang Y, Kim J, Xiu F, Ji S, Zou J, Nealey P F and Wang K L 2010 Nano Lett. 10 224
46. Jin J H, Ko J-H, Yang S C and Bae B-S 2010 Adv. Mater. 22 4510
47. Pirovano A, Redaelli A, Pellizzer F, Ottogalli F, Tosi M, Ielmini D, Lacaita A L and Bez R 2004 IEEE Trans. Device Mater. Reliab. 4 422 (Pubitemid 40049420)
48. Ryu D Y, Shin K, Drockenmuller E, Hawker C J and Russell T P 2005 Science 308 236 (Pubitemid 40558855)
49. Shin D O, Jeong J-R, Han T H, Koo C M, Park H-J, Lim Y T and Kim S O 2010 J. Mater. Chem. 20 7241
50. Eo Y J, Lee T H, Kim S Y, Kang J K, Han Y S and Bae B-S 2005 J. Polym. Sci. B 43 827 (Pubitemid 40496603)
51. Eo Y J, Kim J H, Ko J H and Bae B-S 2005 J. Mater. Res. 20 401 (Pubitemid 41683261)
52. Lee W, Han H, Lotnyk A, Schubert M A, Senz S, Alexe M, Hesse D, Baik S and Gosele U 2008 Nature Nanotechnol. 3 402
53. Feng G, Liu B, Song Z, Feng S and Chen B 2008 Microelectron. Eng. 85 1699
54. Lide D R (ed) 1991 Handbook of Chemistry and Physics 72nd edn (Boca Raton, FL: CRC Press) pp 9107