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Volumn 26, Issue 10, 2014, Pages 3065-3073

Synthesis of N-heterocyclic stannylene (Sn(II)) and germylene (Ge(II)) and a Sn(II) amidinate and their application as precursors for atomic layer deposition

Author keywords

[No Author keywords available]

Indexed keywords

AMIDES; AMORPHOUS FILMS; AMORPHOUS MATERIALS; ASPECT RATIO; CHEMICAL VAPOR DEPOSITION; DEPOSITION; GERMANIUM; INORGANIC COMPOUNDS; SUBSTRATES; THIN FILMS; TIN; TIN OXIDES; VAPORS;

EID: 84901464549     PISSN: 08974756     EISSN: 15205002     Source Type: Journal    
DOI: 10.1021/cm403901y     Document Type: Article
Times cited : (75)

References (55)
  • 40
    • 84901444512 scopus 로고    scopus 로고
    • Provisional application No. 61/320,069, filed on Apr. 1, 2010; US patent application No. 13/077,241, filed on Mar. 31, 2011; Pub. No. US 2012/0027937 A1, Pub. Date: Feb. 2
    • Gordon, R. G.; Hock, A. S.; Heo, J.; Sinsermsuksakul, P. Provisional application No. 61/320,069, filed on Apr. 1, 2010; US patent application No. 13/077,241, filed on Mar. 31, 2011; Pub. No.: US 2012/0027937 A1, Pub. Date: Feb. 2, 2012.
    • (2012)
    • Gordon, R.G.1    Hock, A.S.2    Heo, J.3    Sinsermsuksakul, P.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.