SCOPUS 정보 검색 플랫폼

Dalton Transactions

Volumn , Issue 19, 2008, Pages 2592-2597

Synthesis and characterization of volatile liquid cobalt amidinates

(5) Li, Zhengwen a,b Lee, Don Kuen a,c Coulter, Michael a Rodriguez, Leonard N J a Gordon, Roy G a

a HARVARD UNIVERSITY (United States)

b IBM (United States)

c Cheil Industries Inc (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; CHEMICAL REACTIVITY; DISTILLATION; SYNTHESIS (CHEMICAL); VOLATILE ORGANIC COMPOUNDS;

COBALT AMIDINATES; ROOM TEMPERATURE; VOLATILE LIQUIDS;

COBALT COMPOUNDS;

EID: 43049123467 PISSN: 14779226 EISSN: 14779234 Source Type: Journal
DOI: 10.1039/b800712h Document Type: Article

Times cited : (50)

References (34)

1
- 85111792333
- -45
- Y. Nakamura Electrochem. Soc. Trans. 2007 3 29 45
- (2007) Electrochem. Soc. Trans. , vol.3 , pp. 29
- Nakamura, Y.¹

2
- 4344607913
- -129
- S. L. Zhang M. Ostling Crit. Rev. Solid State Mater. Sci. 2003 28 1 129
- (2003) Crit. Rev. Solid State Mater. Sci. , vol.28 , pp. 1
- Zhang, S.L.¹ Ostling, M.²

3
- 34247511984
- -6595
- J. Tyczkowski R. Kapica J. Lojewska Thin Solid Films 2007 515 6590 6595
- (2007) Thin Solid Films , vol.515 , pp. 6590
- Tyczkowski, J.¹ Kapica, R.² Lojewska, J.³

4
- 0004245602
- Semiconductor Industry Association, Edition
- The International Technology Roadmap for Semiconductors, Semiconductor Industry Association, Edition 2007, http://public.itrs.net
- (2007) The International Technology Roadmap for Semiconductors

5
- 0345448389
- -7958
- B. S. Lim A. Rahtu J.-S. Park R. G. Gordon Inorg. Chem. 2003 42 7951 7958
- (2003) Inorg. Chem. , vol.42 , pp. 7951
- Lim, B.S.¹ Rahtu, A.² Park, J.-S.³ Gordon, R.G.⁴

6
- 0242583886
- -754
- B. S. Lim A. Rahtu R. G. Gordon Nat. Mater. 2003 2 749 754
- (2003) Nat. Mater. , vol.2 , pp. 749
- Lim, B.S.¹ Rahtu, A.² Gordon, R.G.³

7
- 23244463337
- -G185
- Z. Li R. G. Gordon D. B. Farmer Y. Lin J. Vlassak Electrochem. Solid-State Lett. 2005 8 G182 G185
- (2005) Electrochem. Solid-State Lett. , vol.8 , pp. 182
- Li, Z.¹ Gordon, R.G.² Farmer, D.B.³ Lin, Y.⁴ Vlassak, J.⁵

8
- 34547504489
- -H837
- J. Lee H. J. Park S. H. Won K. H. Jeong H. S. Jung C. Kim H. J. Bang C. M. Lee J. H. Kim G. C. Kwon H. L. Cho H. S. Soh J. G. Lee J. Electrochem. Soc. 2007 154 H833 H837
- (2007) J. Electrochem. Soc. , vol.154 , pp. 833
- Lee, J.¹ Park, H.J.² Won, S.H.³ Jeong, K.H.⁴ Jung, H.S.⁵ Kim, C.⁶ Bang, H.J.⁷ Lee, C.M.⁸ Kim, J.H.⁹ Kwon, G.C.¹⁰ Cho, H.L.¹¹ Soh, H.S.¹² Lee, J.G.¹³

9
- 38549166404
- -534
- J. Lee H. Park J. Lee Diffus. Defect Data, Pt. B 2007 124-126 531 534
- (2007) Diffus. Defect Data, Pt. B , vol.124-126 , pp. 531
- Lee, J.¹ Park, H.² Lee, J.³

10
- 33646390681
- -G542
- J. Lee H. J. Yang J. H. Lee J. Y. Kim W. J. Nam H. J. Shin Y. K. Ko J. G. Lee E. G. Lee C. S. Kim J. Electrochem. Soc. 2006 153 G539 G542
- (2006) J. Electrochem. Soc. , vol.153 , pp. 539
- Lee, J.¹ Yang, H.J.² Lee, J.H.³ Kim, J.Y.⁴ Nam, W.J.⁵ Shin, H.J.⁶ Ko, Y.K.⁷ Lee, J.G.⁸ Lee, E.G.⁹ Kim, C.S.¹⁰

11
- 21244442214
- -100
- D. X. Ye S. Pimanpang C. Jezewski F. Tang J. J. Senkevich G. C. Wang T. M. Lu Thin Solid Films 2005 485 95 100
- (2005) Thin Solid Films , vol.485 , pp. 95
- Ye, D.X.¹ Pimanpang, S.² Jezewski, C.³ Tang, F.⁴ Senkevich, J.J.⁵ Wang, G.C.⁶ Lu, T.M.⁷

12
- 38049165756
- -6211
- P. A. Premkumar A. Turchanin N. Bahlawane Chem. Mater. 2007 19 6206 6211
- (2007) Chem. Mater. , vol.19 , pp. 6206
- Premkumar, P.A.¹ Turchanin, A.² Bahlawane, N.³

13
- 34548859196
- -231
- P. A. Premkumar N. Bahlawane G. Reiss K. Kohse-Hoeinghaus Chem. Vap. Deposition 2007 13 227 231
- (2007) Chem. Vap. Deposition , vol.13 , pp. 227
- Premkumar, P.A.¹ Bahlawane, N.² Reiss, G.³ Kohse-Hoeinghaus, K.⁴

14
- 34249748940
- -213509-3
- H.-B.-R. Lee J. Y. Son H. Kim Appl. Phys. Lett. 2007 90 213509-1 213509-3
- (2007) Appl. Phys. Lett. , vol.90 , pp. 213509-1
- Lee, H.-B.-R.¹ Son, J.Y.² Kim, H.³

15
- 33748709832
- -G325
- H.-B.-R. Lee H. Kim Electrochem. Solid-State Lett. 2006 9 G323 G325
- (2006) Electrochem. Solid-State Lett. , vol.9 , pp. 323
- Lee, H.-B.-R.¹ Kim, H.²

16
- 34548275582
- -H903
- K. Lee K. Kim T. Park H. Jeon Y. Lee J. Kim S. Yeom J. Electrochem. Soc. 2007 154 H899 H903
- (2007) J. Electrochem. Soc. , vol.154 , pp. 899
- Lee, K.¹ Kim, K.² Park, T.³ Jeon, H.⁴ Lee, Y.⁵ Kim, J.⁶ Yeom, S.⁷

17
- 0000204098
- -183
- N. R. M. Crawford J. S. Knutsen K.-A. Yang G. Haugstad S. McKernan F. B. McCormick W. L. Gladfelter Chem. Vap. Deposition 1998 4 181 183
- (1998) Chem. Vap. Deposition , vol.4 , pp. 181
- Crawford, N.R.M.¹ Knutsen, J.S.² Yang, K.-A.³ Haugstad, G.⁴ McKernan, S.⁵ McCormick, F.B.⁶ Gladfelter, W.L.⁷

18
- 0000282414
- -186
- P. A. Lane P. E. Oliver P. J. Wright C. L. Reeves A. D. Pitt B. Cockayne Chem. Vap. Deposition 1998 4 183 186
- (1998) Chem. Vap. Deposition , vol.4 , pp. 183
- Lane, P.A.¹ Oliver, P.E.² Wright, P.J.³ Reeves, C.L.⁴ Pitt, A.D.⁵ Cockayne, B.⁶

19
- 0032636378
- -2145
- A. R. Ivanova G. Nuesca X. Chen C. Goldberg A. E. Kaloyeros B. Arkles J. J. Sullivan J. Electrochem. Soc. 1999 146 2139 2145
- (1999) J. Electrochem. Soc. , vol.146 , pp. 2139
- Ivanova, A.R.¹ Nuesca, G.² Chen, X.³ Goldberg, C.⁴ Kaloyeros, A.E.⁵ Arkles, B.⁶ Sullivan, J.J.⁷

20
- 24944590312
- -392
- N. Deo M. F. Bain J. H. Montgomery H. S. Gamble J. Mater. Sci.: Mater. Electron. 2005 16 387 392
- (2005) J. Mater. Sci.: Mater. Electron. , vol.16 , pp. 387
- Deo, N.¹ Bain, M.F.² Montgomery, J.H.³ Gamble, H.S.⁴

21
- 0041524193
- 3124
- H. Choi S. Park Chem. Mater. 2003 15 3121 3124
- (2003) Chem. Mater. , vol.15 , pp. 3121
- Choi, H.¹ Park, S.²

22
- 43049104836
- University of California at Berkeley Extension, Engineering, Berkeley, CA, USA
- R. G. Gordon, "ALD or CVD of Pore-Sealing, Barrier, Adhesion and Seal Layers for Interconnects", Short Course at the Advanced Metallization Conference, Albany, NY, USA, (2007), published on CD-ROM, University of California at Berkeley Extension, Engineering, Berkeley, CA, USA, 2007
- (2007) Ald or Cvd of Pore-Sealing Barrier Adhesion G. Seal Layers for Interconnects" Short Course at the Advanced Metallization Conference Albany Usa (2007) Published on Cd-Rom N.Y.R.G.
- Gordon, R.G.¹

23
- 0035803305
- -6355
- A. R. Sadique M. J. Heeg C. H. Winter Inorg. Chem. 2001 40 6349 6355
- (2001) Inorg. Chem. , vol.40 , pp. 6349
- Sadique, A.R.¹ Heeg, M.J.² Winter, C.H.³

24
- 43049142846
- R. Fuks, US Pat., 3879460, 1975
- (1975) US Pat., 3879460
- Fuks, R.¹

25
- 0009548512
- -268
- R. Fuks B. Caillaux M. Hanocq M. van den Bril Synth. Commun. 1983 13 265 268
- (1983) Synth. Commun. , vol.13 , pp. 265
- Fuks, R.¹ Caillaux, B.² Hanocq, M.³ Van Den Bril, M.⁴

26
- 0001008984
- -1021
- J. H. Forsberg V. T. Spaziano T. M. Balasubramanian G. K. Liu S. A. Kinsley C. A. Duckworth J. J. Poteruca P. S. Brown J. L. Miller J. Org. Chem. 1987 52 1017 1021
- (1987) J. Org. Chem. , vol.52 , pp. 1017
- Forsberg, J.H.¹ Spaziano, V.T.² Balasubramanian, T.M.³ Liu, G.K.⁴ Kinsley, S.A.⁵ Duckworth, C.A.⁶ Poteruca, J.J.⁷ Brown, P.S.⁸ Miller, J.L.⁹

27
- 0037017713
- -1869
- F. Xu J. Sun Q. Shen Tetrahedron Lett. 2002 43 1867 1869
- (2002) Tetrahedron Lett. , vol.43 , pp. 1867
- Xu, F.¹ Sun, J.² Shen, Q.³

28
- 43049144447
- -3742
- W. Ahrens A. Berndt Tetrahedron Lett. 1974 15 3741 3742
- (1974) Tetrahedron Lett. , vol.15 , pp. 3741
- Ahrens, W.¹ Berndt, A.²

29
- 15944374724
- -1735
- Z. Li S. T. Barry R. G. Gordon Inorg. Chem. 2005 44 1728 1735
- (2005) Inorg. Chem. , vol.44 , pp. 1728
- Li, Z.¹ Barry, S.T.² Gordon, R.G.³

30
- 34249941426
- -2805
- J. Wu J. Li C. Zhou X. Lei T. Gaffney J. A. T. Norman Z. Li R. Gordon H. Cheng Organometallics 2007 26 2803 2805
- (2007) Organometallics , vol.26 , pp. 2803
- Wu, J.¹ Li, J.² Zhou, C.³ Lei, X.⁴ Gaffney, T.⁵ Norman, J.A.T.⁶ Li, Z.⁷ Gordon, R.⁸ Cheng, H.⁹

31
- 0008873371
- -42
- F. A. Cotton L. M. Daniels D. J. Maloney C. A. Murillo Inorg. Chim. Acta 1996 242 31 42
- (1996) Inorg. Chim. Acta , vol.242 , pp. 31
- Cotton, F.A.¹ Daniels, L.M.² Maloney, D.J.³ Murillo, C.A.⁴

32
- 0142062142
- -1318
- H. K. Lee T. S. Lam C.-K. Lam H.-W. Li S. M. Fung New J. Chem. 2003 27 1310 1318
- (2003) New J. Chem. , vol.27 , pp. 1310
- Lee, H.K.¹ Lam, T.S.² Lam, C.-K.³ Li, H.-W.⁴ Fung, S.M.⁵

33
- 20444494040
- -2099
- C. A. Nijhuis E. Jellema T. J. J. Sciarone A. Meetsma P. H. M. Budzelaar B. Hessen Eur. J. Inorg. Chem. 2005 2089 2099
- (2005) Eur. J. Inorg. Chem. , pp. 2089
- Nijhuis, C.A.¹ Jellema, E.² Sciarone, T.J.J.³ Meetsma, A.⁴ Budzelaar, P.H.M.⁵ Hessen, B.⁶

34
- 0036026102
- -3461
- J. A. R. Schmidt J. Arnold J. Chem. Soc., Dalton Trans. 2002 3454 3461
- (2002) J. Chem. Soc., Dalton Trans. , pp. 3454
- Schmidt, J.A.R.¹ Arnold, J.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.