메뉴 건너뛰기




Volumn 32, Issue 7, 2013, Pages 1045-1058

Correction: Analytical Thermal Model for Self-Heating in Advanced FinFET Devices With Implications for Design and Reliability (IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems (2013) 32:7 (1045-1058) DOI: 10.1109/TCAD.2013.2248194);Analytical thermal model for self-heating in advanced FinFET devices with implications for design and reliability

Author keywords

Analytical model; device design; electrostatic discharge (ESD); electrothermal; FinFETs; reliability; self heating; thermal modeling; Tri gate FET

Indexed keywords

ADVANCED ANALYTICS; ANALYTICAL MODELS; ELECTROSTATIC DEVICES; FINFET; HEATING; RELIABILITY; RELIABILITY ANALYSIS; SENSITIVITY ANALYSIS; THERMOGRAPHY (TEMPERATURE MEASUREMENT);

EID: 84879911491     PISSN: 02780070     EISSN: 19374151     Source Type: Journal    
DOI: 10.1109/TCAD.2019.2944583     Document Type: Erratum
Times cited : (61)

References (45)
  • 1
  • 2
    • 29744465652 scopus 로고    scopus 로고
    • Thermal conductivity measurements of ultrathin single crystal silicon layers
    • W. Liu and M. Asheghi, "Thermal conductivity measurements of ultrathin single crystal silicon layers," J. Heat Transfer, vol. 128, no. 1, pp. 75-83, 2006.
    • (2006) J. Heat Transfer , vol.128 , Issue.1 , pp. 75-83
    • Liu, W.1    Asheghi, M.2
  • 9
    • 0041886632 scopus 로고    scopus 로고
    • Ideal rectangular cross-section Si-Fin channel double-gate MOSFETs fabricated using orientation-dependent wet etching
    • Jul
    • Y. Liu, K. Ishii, T. Tsutsumi, M. Masahara, and E. Suzuki, "Ideal rectangular cross-section Si-Fin channel double-gate MOSFETs fabricated using orientation-dependent wet etching," IEEE Electron Device Lett., vol. 24, no. 7, pp. 484-486, Jul. 2003.
    • (2003) IEEE Electron Device Lett. , vol.24 , Issue.7 , pp. 484-486
    • Liu, Y.1    Ishii, K.2    Tsutsumi, T.3    Masahara, M.4    Suzuki, E.5
  • 10
    • 80053193612 scopus 로고    scopus 로고
    • RF extraction of self-heating effects in FinFETs
    • Oct
    • S. Makovejev, S. Olsen, and J.-P. Raskin, "RF extraction of self-heating effects in FinFETs," IEEE Trans. Electron Devices, vol. 58, no. 10, pp. 3335-3341, Oct. 2011.
    • (2011) IEEE Trans. Electron Devices , vol.58 , Issue.10 , pp. 3335-3341
    • Makovejev, S.1    Olsen, S.2    Raskin, J.-P.3
  • 14
    • 0036610426 scopus 로고    scopus 로고
    • Measurement of the effect of self-heating in strained-silicon MOSFETs
    • DOI 10.1109/LED.2002.1004235, PII S074131060205348X
    • K. Jenkins and K. Rim, "Measurement of the effect of self-heating in strained-silicon MOSFETs," IEEE Electron Device Lett., vol. 23, no. 6, pp. 360-362, Jun. 2002. (Pubitemid 34731970)
    • (2002) IEEE Electron Device Letters , vol.23 , Issue.6 , pp. 360-362
    • Jenkins, K.A.1    Rim, K.2
  • 16
    • 27844487540 scopus 로고    scopus 로고
    • Foreword: Special section on Electrical Overstress/Electrostatic Discharge (EOS/ESD)
    • DOI 10.1109/TEPM.2005.857126
    • C. Russ, "Foreword: Special section on electrical overstress/electrostatic discharge (EOS/ESD)," in Proc. EOS/ESD Symp., Jul. 2005, p. 205. (Pubitemid 41638190)
    • (2005) IEEE Transactions on Electronics Packaging Manufacturing , vol.28 , Issue.3 , pp. 205
    • Russ, C.1
  • 18
    • 50249095149 scopus 로고    scopus 로고
    • Modeling and analysis of self-heating in FinFET devices for improved circuit and EOS/ESD performance
    • Dec.
    • S. Kolluri, K. Endo, E. Suzuki, and K. Banerjee, "Modeling and analysis of self-heating in FinFET devices for improved circuit and EOS/ESD performance," in Proc. IEEE Int. Electron Devices Meeting, Dec. 2007, pp. 177-180.
    • (2007) Proc. IEEE Int. Electron Devices Meeting , pp. 177-180
    • Kolluri, S.1    Endo, K.2    Suzuki, E.3    Banerjee, K.4
  • 19
    • 84863063791 scopus 로고    scopus 로고
    • Thermalaware device design of nanoscale bulk/SOI FinFETs: Suppression of operation temperature and its variability
    • Dec.
    • T. Takahashi, N. Beppu, K. Chen, S. Oda, and K. Uchida, "Thermalaware device design of nanoscale bulk/SOI FinFETs: Suppression of operation temperature and its variability," in Proc. IEEE Int. Electron Devices Meeting, Dec. 2011, pp. 809-812.
    • Proc. IEEE Int. Electron Devices Meeting , vol.2011 , pp. 809-812
    • Takahashi, T.1    Beppu, N.2    Chen, K.3    Oda, S.4    Uchida, K.5
  • 20
    • 84860240447 scopus 로고    scopus 로고
    • Physical insight toward heat transport and an improved electrothermal modeling framework for FinFET architectures
    • May
    • M. Shrivastava, M. Agrawal, S. Mahajan, H. Gossner, T. Schulz, D. K. Sharma, and V. R. Rao, "Physical insight toward heat transport and an improved electrothermal modeling framework for FinFET architectures," IEEE Trans. Electron Devices, vol. 59, no. 5, pp. 1353-1363, May 2012.
    • (2012) IEEE Trans. Electron Devices , vol.59 , Issue.5 , pp. 1353-1363
    • Shrivastava, M.1    Agrawal, M.2    Mahajan, S.3    Gossner, H.4    Schulz, T.5    Sharma, D.K.6    Rao, V.R.7
  • 23
    • 48149084300 scopus 로고    scopus 로고
    • Electro-thermal analysis of multi-fin devices
    • Jul
    • B. Swahn and S. Hassoun, "Electro-thermal analysis of multi-fin devices," IEEE Trans. VLSI Syst., vol. 16, no. 7, pp. 816-829, Jul. 2008.
    • (2008) IEEE Trans. VLSI Syst. , vol.16 , Issue.7 , pp. 816-829
    • Swahn, B.1    Hassoun, S.2
  • 25
    • 84939377322 scopus 로고
    • Effect of microscale thermal conduction on the packing limit of silicon-on-insulator electronic devices
    • Oct
    • K. E. Goodson and M. I. Flik, "Effect of microscale thermal conduction on the packing limit of silicon-on-insulator electronic devices," IEEE Trans. Components, Hybrids, Manuf. Technol., vol. 15, no. 5, pp. 715-722, Oct. 1992.
    • (1992) IEEE Trans. Components, Hybrids, Manuf. Technol. , vol.15 , Issue.5 , pp. 715-722
    • Goodson, K.E.1    Flik, M.I.2
  • 28
    • 0037097910 scopus 로고    scopus 로고
    • Measurement of thermal conductivity of silicon dioxide thin films using a 3ω method
    • T. Yamane, N. Nagai, S. Katayama, and M. Todoki, "Measurement of thermal conductivity of silicon dioxide thin films using a 3ω method," J. Appl. Phys., vol. 91, no. 12, pp. 9772-9776, 2002.
    • (2002) J. Appl. Phys. , vol.91 , Issue.12 , pp. 9772-9776
    • Yamane, T.1    Nagai, N.2    Katayama, S.3    Todoki, M.4
  • 29
    • 36849089005 scopus 로고    scopus 로고
    • A self-consistent substrate thermal profile estimation technique for nanoscale ICs - Part I: Electrothermal couplings and full-chip package thermal model
    • DOI 10.1109/TED.2007.909039
    • S.-C. Lin, G. Chrysler, R. Mahajan, V. De, and K. Banerjee, "A selfconsistent substrate thermal profile estimation technique for nanoscale ICs - Part I: Electrothermal couplings and full-chip package thermal model," IEEE Trans. Electron Devices, vol. 54, no. 12, pp. 3342-3350, Dec. 2007. (Pubitemid 350225941)
    • (2007) IEEE Transactions on Electron Devices , vol.54 , Issue.12 , pp. 3342-3350
    • Lin, S.-C.1    Chrysler, G.2    Mahajan, R.3    De, V.K.4    Banerjee, K.5
  • 30
    • 36849032227 scopus 로고    scopus 로고
    • A self-consistent substrate thermal profile estimation technique for nanoscale ICs - Part II: Implementation and implications for power estimation and thermal management
    • DOI 10.1109/TED.2007.909038
    • S.-C. Lin, G. Chrysler, R. Mahajan, V. De, and K. Banerjee, "A selfconsistent substrate thermal profile estimation technique for nanoscale ICs - Part II: Implementation and implications for power estimation and thermal management," IEEE Trans. Electron Devices, vol. 54, no. 12, pp. 3351-3360, Dec. 2007. (Pubitemid 350225942)
    • (2007) IEEE Transactions on Electron Devices , vol.54 , Issue.12 , pp. 3351-3360
    • Lin, S.-C.1    Chrysler, G.2    Mahajan, R.3    De, V.K.4    Banerjee, K.5
  • 31
    • 85080627949 scopus 로고    scopus 로고
    • ANSYS Inc.® ANSYS Mechanical [Online]
    • ANSYS, Inc.® ANSYS Mechanical [Online]. Available: http://www.ansys.com/Products/Simulation+Technology/Structural+Mechanics/ ANSYS+Mechanical
  • 32
    • 36449008742 scopus 로고
    • Ballistic metal-oxide-semiconductor field effect transistor
    • K. Natori, "Ballistic metal-oxide-semiconductor field effect transistor," J. Appl. Phys., vol. 76, no. 8, pp. 4879-4890, 1994.
    • (1994) J. Appl. Phys. , vol.76 , Issue.8 , pp. 4879-4890
    • Natori, K.1
  • 33
    • 0036253371 scopus 로고    scopus 로고
    • Essential physics of carrier transport in nanoscale MOSFETs
    • Jan
    • M. Lundstrom and Z. Ren, "Essential physics of carrier transport in nanoscale MOSFETs," IEEE Trans. Electron Devices, vol. 49, no. 1, pp. 131-141, Jan. 2002.
    • (2002) IEEE Trans. Electron Devices , vol.49 , Issue.1 , pp. 131-141
    • Lundstrom, M.1    Ren, Z.2
  • 35
    • 0016036878 scopus 로고
    • Static temperature distribution in IC chips with isothermal heat sources
    • Mar
    • A. Bilotti, "Static temperature distribution in IC chips with isothermal heat sources," IEEE Trans. Electron Devices, vol. 21, no. 3, pp. 217-226, Mar. 1974.
    • (1974) IEEE Trans. Electron Devices , vol.21 , Issue.3 , pp. 217-226
    • Bilotti, A.1
  • 40
    • 0037091483 scopus 로고    scopus 로고
    • Thermal conduction in doped single-crystal silicon films
    • Apr
    • M. Asheghi, K. Kurabayashi, R. Kasnavi, and K. E. Goodson, "Thermal conduction in doped single-crystal silicon films," J. Appl. Phys., vol. 91, no. 8, pp. 5079-5088, Apr. 2002.
    • (2002) J. Appl. Phys. , vol.91 , Issue.8 , pp. 5079-5088
    • Asheghi, M.1    Kurabayashi, K.2    Kasnavi, R.3    Goodson, K.E.4
  • 41
    • 51149220754 scopus 로고
    • Thermal boundary resistance
    • Jul
    • E. T. Swartz and R. O. Pohl, "Thermal boundary resistance," Rev. Mod. Phys., vol. 61, no. 3, pp. 605-668, Jul. 1989.
    • (1989) Rev. Mod. Phys. , vol.61 , Issue.3 , pp. 605-668
    • Swartz, E.T.1    Pohl, R.O.2
  • 42
    • 33645467260 scopus 로고    scopus 로고
    • Thermal conductance of interfaces between highly dissimilar materials
    • Apr
    • Lyeo, Ho-Ki, and David G. Cahill, "Thermal conductance of interfaces between highly dissimilar materials," Phys. Rev. B, vol. 73, no. 14, pp. 1443011-1443016, Apr. 2006.
    • (2006) Phys. Rev. B , vol.73 , Issue.14 , pp. 1443011-1443016
    • Lyeo, H.-K.1    Cahill, D.G.2
  • 43
    • 77953636772 scopus 로고    scopus 로고
    • Energy dissipation and transport in nanoscale devices
    • Mar.
    • E. Pop, "Energy dissipation and transport in nanoscale devices," Nano Research, vol. 3, no. 3, pp. 147-169, Mar. 2010.
    • (2010) Nano Research , vol.3 , Issue.3 , pp. 147-169
    • Pop, E.1
  • 44
    • 84867067581 scopus 로고    scopus 로고
    • Thermal contact resistance across nanoscale silicon dioxide and silicon interface
    • Sep.
    • J. Chen, G. Zhang, and B. Li, "Thermal contact resistance across nanoscale silicon dioxide and silicon interface," J. Appl. Phys., vol. 112, no. 6, pp. 064319-1-0643197, Sep. 2012.
    • (2012) J. Appl. Phys. , vol.112 , Issue.6 , pp. 064319-064311
    • Chen, J.1    Zhang, G.2    Li, B.3
  • 45
    • 46749147861 scopus 로고    scopus 로고
    • Ph.D. dissertation, Dept. Electr. Eng., Stanford Univ., Stanford, CA, USA
    • E. Pop, "Self-heating and scaling of thin body transistors," Ph.D. dissertation, Dept. Electr. Eng., Stanford Univ., Stanford, CA, USA, 2004.
    • (2004) Self-heating and Scaling of Thin Body Transistors
    • Pop, E.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.