Measurement of thermal conductivity of silicon dioxide thin films using a 3ω method

Journal of Applied Physics

Volumn 91, Issue 12, 2002, Pages 9772-9776

  Yamane, Tsuneyuki ^a   Nagai, Naoto ^a   Katayama, Shin Ichiro ^a   Todoki, Minoru ^a  

^a TORAY RESEARCH CENTER INC   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFACIAL RESISTANCES;

SILICA; THIN FILMS;

THERMAL CONDUCTIVITY;

EID: 0037097910     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1481958     Document Type: Article

References (18)

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