Reliability Study of CMOS FinFETs

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 2003, Pages 177-180

  Choi, Yang Kyu ^a   Ha, Daewon ^a   Snow, Eric ^a   Bokor, Jeffrey ^a   King, Tsu Jae ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COMPUTER SIMULATION; DIELECTRIC MATERIALS; FABRICATION; GATES (TRANSISTOR); HIGH TEMPERATURE APPLICATIONS; IMPACT IONIZATION; MOSFET DEVICES; RELIABILITY; SEMICONDUCTOR JUNCTIONS; SILICA; SUBSTRATES;

DEVICE SIMULATORS; ELECTRON TRAPPING;

CMOS INTEGRATED CIRCUITS;

EID: 0842331400     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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