Thermal conductivity measurements of ultra-thin single crystal silicon layers

Journal of Heat Transfer

Volumn 128, Issue 1, 2006, Pages 75-83

  Liu, Wenjun ^a   Asheghi, Mehdi ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

Heat transfer; Measurement techniques; Nanoscale; Phonon rransport; Silicon; Ultra thin films

Indexed keywords

ELECTRIC RESISTANCE MEASUREMENT; HEATING; NANOSTRUCTURED MATERIALS; SEMICONDUCTING SILICON; SINGLE CRYSTALS; TEMPERATURE MEASUREMENT; ULTRATHIN FILMS;

BOLTZMANN TRANSPORT EQUATION; ELECTRICAL-RESISTANCE THERMOMETRY; JOULE HEATING; NANOSCALE;

THERMAL CONDUCTIVITY OF SOLIDS;

ELECTRIC RESISTANCE MEASUREMENT; HEATING; NANOSTRUCTURED MATERIALS; SEMICONDUCTING SILICON; SINGLE CRYSTALS; TEMPERATURE MEASUREMENT; THERMAL CONDUCTIVITY OF SOLIDS; ULTRATHIN FILMS;

EID: 29744465652     PISSN: 00221481     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.2130403     Document Type: Article

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