A literature review on sampling techniques in semiconductor manufacturing

IEEE Transactions on Semiconductor Manufacturing

Volumn 26, Issue 2, 2013, Pages 188-195

  Nduhura Munga, Justin ^a,b   Rodriguez Verjan, Gloria ^a,b   Dauzere Peres, Stephane ^a   Yugma, Claude ^a   Vialletelle, Philippe ^b   Pinaton, Jacques ^b  

^a Centre Microélectronique de Provence   (France)

^b STMICROELECTRONICS   (France)

Author keywords

Control; sampling; semiconductor

Indexed keywords

ADAPTIVE SAMPLING; DYNAMIC SAMPLING; EXCURSION MONITORING; INDUSTRIAL DEPLOYMENT; LITERATURE REVIEWS; SAMPLING TECHNIQUE; SEMICONDUCTOR MANUFACTURING; SEMICONDUCTOR PLANTS;

CONTROL; INDUSTRIAL ENGINEERING; SAMPLING; SEMICONDUCTOR DEVICES; SEMICONDUCTOR MATERIALS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 84877259415     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2013.2256943     Document Type: Article

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