A cost-based heuristic for statistically determining sampling frequency in a wafer fab

2000 Semiconductor Manufacturing Technology Workshop

Volumn , Issue , 2000, Pages 217-229

  Chien, Chen Fu ^a   Hsu, Shao Chung ^b   Peng, S ^b   Wu, Chia Hung ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b MACRONIX INTERNATIONAL CO LTD   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COSTS; ECONOMICS; IMPORTANCE SAMPLING; INSPECTION; MANUFACTURE; PROCESS CONTROL; PROCESS MONITORING; QUALITY CONTROL; RISKS; ROBUSTNESS (CONTROL SYSTEMS); SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS;

ACCEPTANCE SAMPLING PLANS; BAYESIAN DECISION ANALYSIS; CONTROL CHART DESIGN; OPTIMAL SAMPLING FREQUENCY; PROCESS MONITORING AND CONTROL; SAMPLING FREQUENCIES; SAMPLING STRATEGIES; TOTAL EXPECTED COSTS;

COST BENEFIT ANALYSIS;

EID: 84963724926     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SMTW.2000.883099     Document Type: Conference Paper

References (4)

1. A. J. Duncan, "The economic design of X-bar charts used to maintain current control of a process", American Statistical Association Journal, pp. 228-241, June, 1956.
2. R.K. Nurani, R. Akella, and A. J. Strojwas, "In-line defect sampling methodology in yield management: an integrated framework", IEEE Transactions on Semiconductor Manufacturing. V. 9, No. 4, pp. 506-515. 1996.
3. T.J. Lorenzen and L.C. Vance, "The Economic Design of Control Charts: a Unified Approach", Technometrics, V. 28, No. 1, pp. 3-10, 1986.
4. nd ed., John Wiley, New York, 1991.