Feedforward run-to-run control for reduced parametric transistor variation in CMOS logic 0.13 μ m technology

IEEE Transactions on Semiconductor Manufacturing

Volumn 24, Issue 2, 2011, Pages 273-279

  Jedidi, Nader ^a   Sallagoity, Pascal ^b   Roussy, Agnès ^c   Dauzère Pérès, Stéphane ^c  

^a UNIVERSITÉ DE SHERBROOKE   (Canada)

^b STMICROELECTRONICS   (France)

^c ECOLE DES MINES DE SAINT ETIENNE   (France)

Author keywords

Advanced process control (APC); feedforward control; high mix fab; PLS based statistical analysis

Indexed keywords

ADVANCED PROCESS CONTROL; CMOS LOGIC; CONTROLLER ROBUSTNESS; CRITICAL DIMENSION; DEVICE PERFORMANCE; FEED-FORWARD; FEED-FORWARD CONTROLLERS; HIGH-MIX FAB; M-TECHNOLOGIES; NOVEL TECHNIQUES; PLS-BASED STATISTICAL ANALYSIS; RUN-TO-RUN CONTROL; SCATTEROMETRY; TRANSISTOR PERFORMANCE; TRANSISTOR VARIATION;

CONTROLLERS; INTELLIGENT CONTROL; LOGIC CIRCUITS; QUALITY CONTROL; SEMICONDUCTOR DEVICE MANUFACTURE; STATISTICAL METHODS; STATISTICAL PROCESS CONTROL; TRANSISTORS;

FEEDFORWARD CONTROL;

EID: 79955673242     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2011.2120910     Document Type: Conference Paper

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