Optimisation of the process control in a semiconductor company: Model and case study of defectivity sampling

International Journal of Production Research

Volumn 49, Issue 13, 2011, Pages 3873-3890

  Shanoun, M ^a   Bassetto, S ^a   Bastoini, S ^b   Vialletelle, P ^b  

^a LABORATOIRE G SCOP   (France)

^b STMICROELECTRONICS   (France)

Author keywords

defectivity measurement; dynamic control plan; process control; risk measurement

Indexed keywords

CONTROL OPERATIONS; DATA SETS; DEFECTIVITY; DEFECTIVITY MEASUREMENT; DYNAMIC CONTROL PLAN; INDUSTRIAL DEVELOPMENT; LITERATURE REVIEWS; METROLOGY TOOLS; OPTIMISATIONS; RISK MEASUREMENT; SAMPLING PLANS; SEMICONDUCTOR COMPANIES; WAFER FABRICATIONS;

RISK ASSESSMENT; STATISTICAL TESTS;

PROCESS CONTROL;

EID: 79957456407     PISSN: 00207543     EISSN: 1366588X     Source Type: Journal    
DOI: 10.1080/00207543.2010.484429     Document Type: Article

References (40)

1. Baud-Lavigne, B., Bassetto, S., and Penz, B., 2009. A broader view of the economic design of the X-bar chart in the semiconductor industry. International Journal of Production Research, doi: 10.1080/00207540903150593.
2. Bassetto, S., 2005. Toward a dynamic, operational and embeded knowledge manufacturing improvement. Thesis (PhD). ParisTech (in French).
3. Bean, W.J., 1997. Variation reduction in a wafer fabrication line through inspection optimization. Thesis (PhD). MIT.
4. Bousetta, A. and Cross, A., 2005. Adaptive sampling methodology for in-line defect inspection. In: Advanced semiconductor manufacturing conference and workshop, 2005 IEEE/SEMI. 25-31. (Pubitemid 41577652)
5. Chrysler Corporation, Ford Motor Company, General Motors Corporation, 1993. Potential failure mode and effects analysis, reference manual. Southfield, MI: Automotive Industry Action Group (A.I.A.G.).
6. Colledani, M., 2008. Integrated analysis of quality and production logistics performance in asynchronous manufacturing lines. IFAC World Congress, Seoul, 1-7.
7. Colledani, M. and Tolio, T., 2009. Performance evaluation of production systems monitored by statistical process control and off-line inspections. International Journal of Production Economics, in press, doi:10.1016/j.ijpe. 2007.07.011.
8. De Choudens, H., et al., 2000. Natural and technologic disasters, information for a better prevention (In French). Grenoble: Institut des Risques Majeurs.
9. De Magalhães, M., Costa, A., and Moura Neto, F., 2009. A hierarchy of adaptive control charts. International Journal of Production Economics, 119 (2), 271-283.
10. Department of Defense, 1980. Procedures for performing a failure mode, effects, and criticality analysis. MILSTD 1629A.
11. Duncan, A.J., 1956. The economic design of X-bar charts used to maintain current control of a process. Journal of the American Statistical Association, 51 (274), 228-242.
12. Fine, C.H., 1988. A quality control model with learning effects. Operations Research, 36 (3), 437-444.
13. Gershwin, S.B. and Kim, J., 2005. Integrated quality and quantity modeling of a production line. OR Spectrum, 27, 287-314. (Pubitemid 40550378)
14. Hsu, J.I.S., 1977. A cost model for skip-lot destructive sampling. IEEE Transactions on Reliability, 26, April.
15. Hsu, L. and Tapiero, C.S., 1989. Quality control of the M/G/1 queue. European Journal of Operational Research, 42 (1), 88-100. (Pubitemid 20607729)
16. Kumar, N., et al., 2006. A review of yield modelling techniques for semiconductor manufacturing. International Journal of Production Research, 23, December, 5019-5036. (Pubitemid 44627508)
17. Li, J. and Meerkov, S.M., 2009. Production systems engineering. New York: Springer.
18. Lindsay, G.F. and Bishop, A.B., 1964. Allocation of screening inspection effort - a dynamic programming approach. Management Science, 10 (2), 342-352.
19. Lorenzen, T.J. and Vance, L.C., 1986. The economic design of control charts: A unified approach. Technometrics, 28 (1), 3-10.
20. May, G.S. and Spanos, C.J., 2006. Fundamentals of semiconductor manufacturing and process control. New Jersey: Wiley-Interscience IEEE.
21. Mili, A., et al., 2009. Dynamic risk management unveil productivity improvements. Journal of Loss Prevention in the Process Industries, 22 (1), 25-34.
22. Montgomery, D., 2004. Introduction to statistical quality control. 5th ed. Hoboken, New Jersey: Wiley & Sons.
23. Mouli, C. and Scott, M., 2007. Adaptive metrology sampling techniques enabling higher precision in variability detection and control. In: Advanced semiconductor manufacturing conference, 2007. ASMC 2007. IEEE/SEMI. 12-17. (Pubitemid 47468997)
24. Ozouf, V., 2009. How to warrant an acceptable risk level in an ever shrinking development environment and complexity increasing environment (in French). Savoie University.
25. Pillet, M., et al., 2007. Impact matrix for designing control plan (in French). Rabat, Maroc: CPI.
26. Purdy, M., 2007. Dynamic, weight-based sampling algorithm. ISSM 2007. International symposium on semiconductor manufacturing, Santa Clara, CA, 1-4.
27. Raz, T., 1986. A survey of models for allocating inspection effort in multistage production systems. Journal of Quality Technology, 18 (4), 239-247.
28. Reynolds Jr., M.R., et al., 1988. X charts with variable sampling intervals. Technometrics, 30 (2), 181-192.
29. Spanos, C.J., 1991. Statistical process control in semiconductor manufacturing. Microelectronic Engineering, 10 (3-4), 271-276.
30. Tagaras, G., 1998. A survey of recent developments in the design of adaptive control charts. Journal of Quality Technology, 30 (3), 212-231. (Pubitemid 128574020)
31. Tang, K. and Tang, J., 1994. Design of screening procedures: A review. Journal of Quality Technology, 26 (3), 209-247.
32. Tapiero, C.S., 1987. Production learning and quality control. IIE Transactions, 19 (4), 362-270.
33. Terwiesch, C. and Bohn, R.E., 2001. Learning and process improvement during production ramp-up. International Journal of Production Economics, 70 (1), 1-19. (Pubitemid 32160564)
34. Tixier, J., et al., 2002. Review of 62 risk analysis methodologies of industrial plants. Journal of Loss Prevention in the Process Industries, 15 (4), 291-303. (Pubitemid 34689964)
35. Verduzco, A., Villalobos, J.R., and Vega, B., 2001. Information-based inspection allocation for real-time inspection systems. Journal of Manufacturing Systems, 20 (1), 13-22. (Pubitemid 33613099)
36. Villacourt, M., 1992. Failure mode and effects analysis (FMEA): A guide for continuous/line improvement for the semiconductor equipment industry SEMATECH. Transfer 92020963B-ENG.
37. Villalobos, J.R., Foster, J.W., and Disney, R.L., 1993. Flexible inspection system for serial multistage production systems. IIE Transactions, 25 (3), 16.
38. Vommi, V.B. and Seetala, M.S., 2007. A new approach to robust economic design of control charts. Applied Soft Computing, 7 (1), 211-228. (Pubitemid 44739429)
39. Woodall, W., 1986. Weaknesses of the economic design of control charts. Technometrics, 28 (4), 408-409.
40. Zamaï, E., 1997. Monitoring-command architecture for complex discrete events systems (In French). Thesis (PhD). Grenoble University.