Adaptive metrology sampling techniques enabling higher precision in variability detection and control

ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings

Volumn , Issue , 2007, Pages 12-17

  Scott, Michael J ^a  

^a INTEL CORPORATION   (United States)

Author keywords

Adaptive sampling; DFM; Metrology

Indexed keywords

FAULT DETECTION; MEASUREMENT THEORY; SAMPLING; SEMICONDUCTOR DEVICE MANUFACTURE; STATISTICAL PROCESS CONTROL;

ADAPTIVE SAMPLING; ADVANCED PROCESS CONTROL (APC); FAULT DETECTION AND CLASSIFICATION (FDC); VARIABILITY DETECTION;

ADAPTIVE SYSTEMS;

EID: 34748843918     PISSN: 10788743     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ASMC.2007.375072     Document Type: Conference Paper

References (0)