A fab-wide APC sampling application

IEEE Transactions on Semiconductor Manufacturing

Volumn 20, Issue 4, 2007, Pages 393-399

  Holfeld, André ^a   Barlović, Robert ^a   Good, Richard P ^b  

^a IBM MICROELECTRONICS   (United States)

^b ADVANCED MICRO DEVICES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADVANCED PROCESS CONTROLS; CYCLE TIME; EVENT-BASED; MANUFACTURING PROCESS; PROCESS VARIANCES; RUN TO RUNS; SOURCES OF VARIATIONS; STATE-OF-THE-ART TECHNOLOGIES; WAFER LEVELS;

CHEMICAL PLANTS; ELECTRIC NETWORK TOPOLOGY; FAULT DETECTION;

APPLICATIONS;

EID: 45549093219     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2007.907613     Document Type: Article

References (10)

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