Method for efficiently managing metrology queues

IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

Volumn , Issue , 2005, Pages 71-74

  Purdy, Matthew ^a,b   Nicksic, Cabe ^a   Lensing, Kevin ^a  

^a ADVANCED MICRO DEVICES   (United States)

^b Seattle Radiologists   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FACTORY AUTOMATION; MEASUREMENTS; PRODUCTION CONTROL;

DATA COLLECTION; QUALITY METROLOGY; QUEUE MANAGEMENT;

QUALITY CONTROL;

EID: 28744450192     PISSN: 1523553X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/issm.2005.1513299     Document Type: Conference Paper

References (0)