Determination of the transfer function for optical surface topography measuring instruments - A review

Measurement Science and Technology

Volumn 24, Issue 5, 2013, Pages

  Foreman, Matthew R ^a,b   Giusca, Claudiu L ^b   Coupland, Jeremy M ^c   Török, Peter ^a   Leach, Richard K ^b  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

^b NATIONAL PHYSICAL LABORATORY   (United Kingdom)

^c LOUGHBOROUGH UNIVERSITY   (United Kingdom)

Author keywords

areal surface topography; linear theory; optical instruments; optical transfer function; point spread function

Indexed keywords

IMAGING SYSTEMS; OPTICAL INSTRUMENTS; OPTICAL TRANSFER FUNCTION; SURFACE TOPOGRAPHY; TOPOGRAPHY;

AREAL SURFACE TOPOGRAPHIES; CONFOCAL SCANNING IMAGING SYSTEM; EXPERIMENTAL METHODS; LINEAR THEORY; MEASURING INSTRUMENTS; OPTICAL INSTRUMENTATION; THREE DIMENSIONAL (3-D) IMAGING; TOPOGRAPHY MEASUREMENT;

TRANSFER FUNCTIONS;

EID: 84876717975     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/24/5/052001     Document Type: Review

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