Measuring the phase transfer function of a phase-shifting interferometer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7064, Issue , 2008, Pages

  Jiyoung, Chu ^a,b   Quandou, Wang ^a   Lehan, John P ^c,d   Guangjun, Gao ^a   Griesmann, Ulf ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^c UNIVERSITY OF MARYLAND BALTIMORE COUNTY   (United States)

^d NASA GODDARD SPACE FLIGHT CENTER   (United States)

Author keywords

Height transfer function; Interferometer; Lithography; Modulation transfer function

Indexed keywords

INTERFEROMETERS; INTERFEROMETRY; LITHOGRAPHY; MIRRORS; MODULATION; OPTICAL TESTING; OPTICAL TRANSFER FUNCTION;

ITS APPLICATIONS; NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY; OPTICAL IMAGING SYSTEM; PHASE TRANSFER FUNCTIONS; PHASE-SHIFTING INTERFEROMETERS; RADIAL DIRECTION; SPATIAL FREQUENCY; VARIABLE SPACING;

TRANSFER FUNCTIONS;

EID: 52249108055     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.795243     Document Type: Conference Paper

References (4)

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3. P. de Groot and X. C. de Lega, "Interpreting interferometric height measurements using the instrument transfer function," Proceedings of the 5th International workshop on automatic processing of fringe patterns, Springer (2005)
4. V. V. Yashchuk, W. R. Mckinney, and P. Z. Takacs, "Binary Pseudo-random grating as a standard test surface for measurement of modulation transfer function of interferometric microscopes," Proc. SPIE 6704, 670408 (2007)