Calibration of the modulation transfer function of surface profilometers with binary pseudorandom test standards: Expanding the application range to Fizeau interferometers and electron microscopes

Optical Engineering

Volumn 50, Issue 9, 2011, Pages

  Yashchuk, Valeriy V ^a   Anderson, Erik H ^a   Barber, Samuel K ^a,c   Bouet, Nathalie ^b   Cambié, Rossana ^a   Conley, Raymond ^b   McKinney, Wayne R ^a   Takacs, Peter Z ^b   Voronov, Dmitriy L ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b BROOKHAVEN NATIONAL LABORATORY   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Binary pseudorandom; Calibration; Interferometer; Modulation transfer function; Power spectral density; Scanning electron microscope; Surface metrology; Surface profilometer; Transmission electron microscope

Indexed keywords

POWER SPECTRAL; PSEUDO RANDOM; SCANNING ELECTRON MICROSCOPE; SURFACE METROLOGY; SURFACE PROFILOMETER; TRANSMISSION ELECTRON MICROSCOPE;

BANDWIDTH; CALIBRATION; DATA HANDLING; ELECTRONS; INTERFEROMETERS; LASER OPTICS; METEOROLOGICAL INSTRUMENTS; MODULATION; POWER SPECTRAL DENSITY; PROFILOMETRY; SCANNING ELECTRON MICROSCOPY; SPECTRAL DENSITY; SURFACES; TESTING; TRANSMISSION ELECTRON MICROSCOPY; UNITS OF MEASUREMENT;

OPTICAL TRANSFER FUNCTION;

EID: 80054072091     PISSN: 00913286     EISSN: 15602303     Source Type: Journal    
DOI: 10.1117/1.3622485     Document Type: Article

References (66)

1. E. L. Church, H. A. Jenkinson, and J. M. Zavada, "Relationship between surface scattering and microtopographic features," Opt. Eng. 18(2), 125-136 (1979).
2. E. L. Church and H. C. Berry, "Spectral analysis ofthe finish of polished optical surfaces," Wear 83, 189-201 (1982).
3. J. C. Stover, Optical Scattering, 2nd Ed., SPIE Optical Engineering Press, Bellingham (1995).
4. D. Attwood, Soft X-rays and Extreme Ultraviolet Radiation, Cambridge University Press, New York (1999).
5. Y. Z. Hu and K. Tonder, "Simulation of 3D random rough surface by 2D digital filter and Fourier analysis," Int. J. Mach. Tools Manufact. 32, 83-90 (1992).
6. H. Yamaoka, T. Uruga, E. Arakawa, M. Matsuoka, Y. Ogasaka, K. Yamashita, and N. Ohtomo, "Development and surface evaluation of large SiC x-ray mirrors for high-brilliance synchrotron radiation," Jpn. J. Appl. Phys. 33, 6718-6726 (1994).
7. J. Sherrington and G. W. Howarth, "Approximate numerical models of 3D surface topography generated using sparse frequency domain descriptions," Int. J. Mach. Tools Manufact. 38(5-6), 599-606 (1998).
8. E. Sidick, "Power spectral density specification and analysis of large optical surfaces," Proc. SPIE 7390, 73900L (2009).
9. V. L. Popova and A. E. Filippov, A model of mechanical polishing in the presence of a lubricant," Tech. Phys. Lett. 31(9) 788-792 (2005).
10. A. V. Pret, R. Gronheid, T. Ishimoto, and K. Sekiguchi, "Resist roughness evaluation and frequency analysis: metrological challenges and potential solutions for extreme ultraviolet lithography," J. Micro/Nanolith. MEMS MOEMS 9(4), 041308 (2010).
11. F. Varnier, N. Mayani, G. Rasigni, and M. Rasigni, "Surface roughness for metallic thin films deposited upon various dielectric coatings," J. Vac. Sci. Technol. A 5(4), 1806-1808 (1987).
12. M. H. Modi, S. K. Rai, M. Thomasset, G. S. Lodha, and M. Idir, "Effect of surface roughness on multilayer film growth," Eur. Phys. J. Spec. Top. 167, 27-32 (2009).
13. G. D. Boreman, Modulation Transfer Function in Optical and Electro-Optical Systems, SPIE Press, Bellingham, Washington (2001).
14. K. L. Westra and D. J. Thomson, "Effect of tip shape on surface roughness measurements from atomic force microscopy images of thin films," J. Vac. Sci. Technol. B 13(2), 344-349 (1995).
15. R. N. Bracewell, The Fourier Transform and Its Applications, McGraw-Hill Publishing Company, New York (1986).
16. J. M. Elson and J. M. Bennett, "Calculation of the power spectral density from surface profile data," Appl. Opt. 34(1), 201-208 (2001).
17. V. V. Yashchuk, A. D. Franck, S. C. Irick, M. R. Howells, A. A. MacDowell, and W. R. McKinney, Two dimensional power spectral density measurements of x-ray optics with the MicroMap interferomet-ric microscope," Proc. SPIE 5858, 58580A (2005).
18. V. V. Yashchuk, S. C. Irick, E. M. Gullikson, M. R. Howells, A. A. MacDowell, W. R. McKinney, F. Salmassi, and T. Warwick, Cross-checkofdifferent techniques for two dimensional power spectral density measurements of x-ray optics," Proc. SPIE 5921, 59210G (2005).
19. V. V. Yashchuk, E. M. Gullikson, M. R. Howells, S. C. Irick, A. A. MacDowell, W. R. McKinney, F. Salmassi, T. Warwick, J. P. Metz, and T. W. Tonnessen, Surface roughness of stainless-steel mirrors for focusing soft x-rays," Appl. Opt. 45(20) 4833-4842 (2006).
20. R. Barakat, "Determination of the optical transfer function directly from the edge spread function," J. Opl. Soc. Am. 55(10), 1217-1219 (1965).
21. B. Tatian, "Method for obtaining the transfer function from the edge response function," J. Opl. Soc. Am. 55(8), 1014-1019 (1965).
22. K. Creath, "Calibration of numerical aperture effects in interferometric microscope objectives," Appl. Opt. 28(15), 3333-3338 (1989).
23. P. Z. Takacs, M. X. Li, K. Furenlid, and E. L. Church, "Step-height standard for surface-profiler calibration," Proc. SPIE 1995, 235-244 (1993).
24. A. Harasaki and J. C. Wyant, "Fringe modulation skewing effect in white-light vertical scanning interferometry," Appl. Opt. 39(13), 2101-2106 (2000).
25. G. D. Boreman and S. Yang, "Modulation transfer function measurement using three- and four-bar targets," Appl. Opt. 34(34), 8050-8052 (1995).
26. M. Marchywka and D. G. Socker, "Modulation transfer function measurement technique for small pixel detectors," Appl. Opt. 31(34), 7198-7213 (1992).
27. O. P. Nijhawan, P. K. Datta, and J. Bhushan, "On the measurement of MTF using periodic patters of rectangular and triangular wave-forms," Nouv. Rev. Opt. 6(1), 33-36 (1975).
28. H. G. Rhee, T. V. Vorburger, J. W. Lee, and J. Fu, "Discrepancies between roughness measurements obtained with phase shifting interferometer and white-light interferometry," Appl. Opt. 44(28), 5919-5927 (2005).
29. J. Chu, Q. Wang, J. P. Lehan, G. Gao, and U. Griesmann, "Measuring the phase transfer function of a phase-shifting interferometer," Proc. SPIE 7064, 70640C (2008).
30. J. Chu, Q. Wang, J. P. Lehan, G. Gao, and U. Griesmann, "Spatially resolved height response of phase-shifting interferometers measured using a patterned mirror with varying spatial frequency," Opt. Eng. 49(9), 095601 (2010).
31. E. Levy, D. Peles, M. Opher-Lipson, and S. G. Lipson, "Modulation transfer function of a lens measured with a random target method," Appl. Opt. 38(4), 679-683 (1999).
32. C. R. Wolfe, J. D. Downie, and J. K. Lawson, "Measuring the spatial frequency transfer functionofphase-measuring interferometers for laser optics," Proc. SPIE 2870, 553-557 (1996).
33. J. F. Song and T. Vorbuerger, "Standard reference specimens in quality control of engineering surfaces," J. Res. Nation Inst. Stand. Technol. 96, 271-289 (1991).
34. V. V. Yashchuk, W. R. McKinney, and P. Z. Takacs, Binary pseudorandom grating standard for calibration of surface profilometers," Opt. Eng. 47(7) 073602 (2008).
35. V. V. Yashchuk, W. R. McKinney, and P. Z. Takacs, Binary pseudorandom grating as a standard test surface for measurement of modulation transfer function of interferometric microscopes," Proc. SPIE 6704 670408 (2007).
36. S. K. Barber, P. Soldate, E. D. Anderson, R. Cambie, W. R. McKinney, P. Z. Takacs, D. L. Voronov, and V. V. Yashchuk, "Development of pseudo-random binary gratings and arrays for calibration of surface profile metrology tools," J. Vac. Sci. Tech. B 27(6), 3213-3219 (2009).
37. S. K. Barber, E. D. Anderson, R. Cambie, W. R. McKinney, P. Z. Takacs, J. C. Stover, D. L. Voronov, and V. V. Yashchuk, "Binary pseudo-random gratings and arrays for calibration of modulation transfer function ofsurface profilometers,"Nucl. Instr. Meth. A 616, 172-182 (2010).
38. S. K. Barber, P. Soldate, E. D. Anderson, R. Cambie, S. Marchesini, W. R. McKinney, P. Z. Takacs, D. L. Voronov, and V. V. Yashchuk, "Binary pseudo-random gratings and arrays for calibration of the modulation transfer function of surface profilometers: recent developments," Proc. SPIE 7448, 744802 (2009).
39. S. K. Barber, E. Anderson, R. Cambie, S. Marchesini, W. R. McKinney, P. Z. Takacs, D. L. Voronov, and V. V. Yashchuk, "Stability of modulation transfer function calibration of surface profilometers using binary pseudo-random gratings and arrays with non-ideal groove shapes,"Opt. Eng. 49(5), 053606 (2010).
40. P. H. Bardell, W. H. McAnney, and J. Savir, Built-in Test for VLSI Pseudorandom Techniques, John Wiley and Sons, Inc., New York (1987).
41. A. Busboom, H. Elders-Boll, and H. D. Schotten, "Uniformly redundant arrays," Experimental Astronomy. Astrophysical Instrumentation and Methods 8, 97-123 (1998).
42. B. Sclar, Digital Communications: Fundamentals and Applications, 2nd Ed., Prentice Hall, Englewood Cliffs, NJ (2001).
43. T. Etzon, "Construction for perfect maps and pseudo-random arrays," IEEE Trans. Inf. Theory 34(5), 1308-1316 (1988).
44. D. D. Koleske and S. J. Sibener, "Generation of pseudo-random sequence for use in cross-correlation modulation," Rev. Sci. Instrum. 63(8), 3852-3855 (1992).
45. A. Mitra, "On pseudo-random and orthogonal binary spreading sequences," International Journal of Information and Communication Engineering 4(6), 447-454 (2008).
46. W. T. Chu, "Impulse-response and reverberation-decay measurements made by using a periodic pseudorandom sequence," Appl. Acoustics 29, 193-205 (1990).
47. T. E. Stern, A. Blaquiere, and J. Valat, "Reactivity measurement using pseudo-random source excitation," J. Nucl. Energy, Parts A/B 16, 499-508 (1962).
48. J. Gordon, N. Kroo, G. Orban, L. Pal, P. Pellionisz, F. Szlavik, and I. Vizi, "Correlation type time-of-flight spectrometer with magnetically pulsed polarized neutrons," Phys. Lett. A 26, 122-123 (1968).
49. K. Skold, "A mechanical correlation chopper for thermal neutron spec-troscopy," Nucl. Instrum. Methods 63, 114-116 (1968).
50. A. Virjo, "Statistical analysis of cross-correlation chopper for time-offlight measurements," Nucl. Instrum. Methods 63, 351-352 (1968).
51. A. Virjo, "The Fourier method in slow neutron time-of-flight spectrom-etry with a pseudo-random input signal," Nucl. Instrum. Methods 73, 189-199 (1969).
52. A. Virjo, "Slow neutron time-of-flight spectrometry with a pseudorandom input signal," Nucl. Instrum. Methods 75(1), 77-84 (1969).
53. V. L. Hirschy and J. P. Aldridge, A cross correlation chopper for molecular beam modulation," Rev. Sci. Instrum. 42(3) 381-383 (1971).
54. G. Comsa, R. David, and B. J. Schumacher, "Magnetically suspended cross-correlation chopperinmolecular beam-surface experiments," Rev. Sci. Instrum. 52(6), 789-791 (1981).
55. V. V. Yashchuk, B. N. Ashkinadzi, M. N. Groshev, V. F. Ezhov, T. A. Isaev, V. A. Knyazkov, G. B. Krygin, and V. L. Ryabov, Cross-correlation time-of-flight spectrometer of molecular beams," Instrum. Exp. Tech. 40(4) 501-507 (1997).
56. S. M. Kay, Modern Spectral Estimation: Theory and Application, Prentice Hall, Englewood Cliffs, New Jersey (1988).
57. E. E. Fenimore and T. M. Cannon, "Coded aperture imaging with uniformly redundant arrays," Appl. Opt. 17(3), 337-347 (1978).
58. E. Caroli, J. B. Stephen, G. Di Cocco, L. Natalucci, and A. Spizzichino, "Coded aperture imaging in x- and gamma-ray astronomy," Space Sci. Rev. 45, 349-403 (1987).
59. E. M. Gullikson, private communication.
60. G. C. Holst, CCD Arrays, Cameras, and Displays, SPIE Optical Engineering Press, Bellingham (1998).
61. Materials Science, Inc., http://www.msi-pse.com/Polaris.htm.
62. R. Conley, C. Liu, J. Qian, C. M. Kewish, A. T. Macrander, H. Yan, H. C. Kang, J. Maser, and G. B. Stephenson, "Wedged multilayer Laue lens," Rev. Sci. Instrum. 79, 053104 (2008).
63. R. Conley, C. Liu, C. M. Kewish, A. T. Macrander, and C. Morawe, "Multilayer growth in the APS rotary deposition system," Proc. SPIE 6704, 670505 (2007).
64. Evans Analytical Group, Inc., http://www.eaglabs.com.
65. W. Wang and H. Farid, "Exposing Digital Forgeries in Video by Detecting Double MPEG Compression," in MM&Sec2006, Geneva, Switzerland (2006).
66. A. Popescu and H. Farid, "Statistical tools for digital forensics," in 6th International Workshop on Information Hiding, Toronto, Canada (2004).