Binary pseudorandom grating standard for calibration of surface profilometers

Optical Engineering

Volumn 47, Issue 7, 2008, Pages

  Yashchuk, Valeriy V ^a,b   McKinney, Wayne R ^a,b   Takacs, Peter Z ^a,c  

^a SPIE ^*

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^c BROOKHAVEN NATIONAL LABORATORY   (United States)

Author keywords

Interference microscopy; Metrology; Profilometry; Standards; Surface roughness

Indexed keywords

CALIBRATION METHODS; DETECTOR ARRAY (DA); HEIGHT DISTRIBUTION; INTERFEROMETRIC MICROSCOPES; MODULATION TRANSFER FUNCTION (MTF); NYQUIST FREQUENCIES; OPTICAL INSTRUMENTATION; POWER SPECTRAL DENSITY (P.S.D); PSEUDO-RANDOM (PN); SPATIAL FREQUENCIES; SQUARE ROOTING; STANDARD TESTING; SURFACE PROFILOMETERS;

CALIBRATION; ELECTRONIC EQUIPMENT TESTING; GEODETIC SATELLITES; INTERFEROMETRY; MICROSCOPES; MODULATION; OPTICAL TRANSFER FUNCTION; POWER SPECTRAL DENSITY; PULSE SHAPING CIRCUITS; STANDARDS; TRANSFER FUNCTIONS;

FREQUENCY RESPONSE;

EID: 47349115732     PISSN: 00913286     EISSN: 15602303     Source Type: Journal    
DOI: 10.1117/1.2955798     Document Type: Article

References (26)

1. R. N. Bracewell, The Fourier Transform and Its Applications, McGraw-Hill Publishing Company, New York (1986).
2. V. V. Yashchuk, A. D. Franck, S. C. Trick, M. R. Howells, A. A. MacDowell, and W. R. McKinney, "Two dimensional power spectral density measurements of x-ray optics with the Micromap interferometric microscope," Proc. SPIE 5858, 58580 1-12 (2005).
3. V. V. Yashchuk, S. C. Irick, E. M. Gullikson, M. R. Howells, A. A. MacDowell, W. R. McKinney, F. Salmassi, and T. Warwick, "Cross-check, of different techniques for two dimensional power spectral density measurements of x-ray optics," Proc. SPIE 5921, pp. 59210G-1-12 (2005).
4. V. V. Yashchuk, E. M. Gullikson, M. R. Howells, S. C. Irick, A. A. MacDowell, W. R. McKinney, F. Salmassi, T. Warwick, J. P. Metz, and. T. W. Tonnessen, "Surface roughness of stainless-steel mirrors for focusing soft x rays," Appl. Opt. 45(20), 4833-4842 (2006).
5. L. Assoufid, O. Hignette, M. Howells, S. Irick, H. Lammert, and P. Takacs, "Future metrology needs for synchrotron radiation grazingincidence optics," Nucl. Instrum. Methods Phys. Res. A 467-468, 267-270 (2001).
6. E. L. Church, H. A. Jenkinson, and J. M. Zavada, "Relationship between surface scattering and micro-topographic features," Opt. Eng. 18(2), 125-136 (1979).
7. D. Attwood, Soft X-Rays and Extreme Ultraviolet Radiation, Cambridge Univ. Press, New York (1999).
8. G. D. Boreman, Modulation Transfer Function in Optical and Electro-optical Systems, SPIE Press, Bellingham, WA (2001).
9. K. Creath, "Calibration of numerical aperture effects in interferometric microscope objectives," Appl. Opt. 28(15), 3333-3338 (1989).
10. P. Z. Takacs, M. X. Li, K. Furenlid, and E. L. Church, "Step-height standard for surface-profiler calibration," Proc. SPIE 1995, 235-244 (1993).
11. C. R. Wolfe, J. D. Downie, and J. K. Lawson, "Measuring the spatial frequency transfer function of phase-measuring interferometers for laser optics," Proc. SPIE 2870, 553-557 (1996).
12. H. G. Rhee, T. V. Vorburger, J. W. Lee, and J. Fu, "Discrepancies between roughness measurements obtained with phase shifting interferometer and white-light interferometry," Appl. Opt. 44(28), 5919-5927 (2005).
13. A. Harasaki and J. C. Wyant, "Fringe modulation skewing effect in white-light vertical scanning interferometry," Appl. Opt. 39, 2101-2106 (2000).
14. T. Etzion, "Construction for perfect maps and pseudo-random arrays," IEEE Trans. Inf. Theory 34(5), 1308-1316 (1988).
15. D. D. Koleske and S. J. Sibener, "Generation of pseudo-random sequence for use in cross-correlation modulation," Rev. Sci. Instrum. 63(8), 3852-3855 (1992).
16. H. D. Luke and A. Busboom, "Binary arrays with perfect odd-periodic autocorrelation," Appl. Opt. 36(26), 6612-6619 (1999).
17. V. L. Hirschy and J. P. Aldridge, "A cross correlation chopper for molecular beam modulation," Rev. Sci. Instrum. 42(3), 381-383 (1971).
18. G. Comsa, R. David, and B. J. Schumacher, "Magnetically suspended cross-correlation chopper in molecular beam-surface experiments," Rev. Sci. Instrum. 52(6), 789-791 (1981).
19. V. V. Yashchuk, B. N. Ashkinadzi, M. N. Groshev, V. F. Ezhov, T. A. Isaev, V. A. Knyazkov, G. B. Krygin, and V. L. Ryabov, "Crosscorrelation time-of-flight spectrometer of gas-dynamic molecular beams," Instrum. Exp. Tech. 40(4), 501 (1997).
20. G. M. Jenkins and D. G. Watts, Spectral Analysis and Its Applications, 5 printing, Emerson-Adams Press, Boca Raton, FL (2000).
21. J. W. Goodman, Introduction to Fourier Optics, 3rd ed., Roberts & Company, Englewood, CO (2005).
22. E. L. Church and P. Z. Takacs, "Effects of optical transfer function in surface-profile measurements," Proc. SPIE 1164, 46-59 (1989).
23. J. F. Song and T. Vorbuerger, "Standard, reference specimens in quality control of engineering surfaces," J. Res. Natl. Inst. Stand. Technol. 96, 271 (1991).
24. E. E. Fenimore and T. M. Cannon, "Coded aperture imaging with uniformly redundant arrays," Appl. Opt. 17(3), 337-347 (1978).
25. E. Caroli, J. B. Stephen, G. Di Coceo, L. Natalucci, and A. Spizzichino, "Coded aperture imaging in x- and gamma-ray astronomy," Space Sci. Rev. 45, 349-403 (1987).
26. E. Levy, D. Peles, M. Opher-Lipson, and S. G. Lipson, "Modulation transfer function of a lens measured with a random target method," Appl. Opt. 38(4), 679-683 (1999).