Development of measurement standards for verifying functional performance of surface texture measuring instruments

Journal of Physics: Conference Series

Volumn 311, Issue 1, 2011, Pages

  Fujii, A ^a   Suzuki, H ^a   Yanagi, K ^b  

^a OLYMPUS CORPORATION   (Japan)

^b NAGAOKA UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

SURFACE MEASUREMENT;

AMPLITUDE RESPONSE; FUNCTIONAL PERFORMANCE; HORIZONTAL CROSS SECTION; LASER SCANNING MICROSCOPE; LATERAL DIRECTIONS; MEASUREMENT STANDARDS; MEASURING INSTRUMENTS; SINUSOIDAL SURFACES;

UNITS OF MEASUREMENT;

EID: 80053923004     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/311/1/012009     Document Type: Conference Paper

References (6)

1. Rhee H G, Vorburger T V, Lee J W and Fu J 2005 Appl. Opt. 44 5919-27
2. Leach R K, Haitjema H 2010 Meas. Sci. Technol. 21 032001
3. Fujii A, Suzuki H and Yanagi K, 2010 Proc. ASPE Summer Topical Meeting on Precision Interferometric Metrology vol 49 (Ashville,USA) p 91-96
4. Nemoto K, Yanagi K, Aketagawa M, Yoshida I, Uchidate M, Miyaguchi T and Maruyama H 2009 Meas. Sci. Technol. 20 084023
5. th Int. Conf. on Metrology and Properties of Engineering Surfaces p 71-75
6. Gao F, Leach R K, Petzing J, Coupland J M 2008 Meas. Sci. Technol. 19 015303