Application of linear systems theory to characterize coherence scanning interferometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8430, Issue , 2012, Pages

  Mandal, Rahul ^a   Palodhi, Kanik ^a   Coupland, Jeremy ^a   Leach, Richard ^b   Mansfield, Daniel ^c  

^a LOUGHBOROUGH UNIVERSITY   (United Kingdom)

^b NATIONAL PHYSICAL LABORATORY   (United Kingdom)

^c Taylor and Hobson Ltd   (United Kingdom)

Author keywords

coherence scanning interferometry; inverse filter; point spread function; three dimensional linear filtering theory; transfer function

Indexed keywords

FREQUENCY DOMAINS; INTERFEROGRAMS; INVERSE FILTERS; LINEAR FILTERING; LINEAR FILTERING THEORY; SCANNING INTERFEROMETERS; SPACE DOMAIN;

INTERFEROMETRY; LINEAR SYSTEMS; OPTICAL TRANSFER FUNCTION; SIGNAL FILTERING AND PREDICTION; SURFACE MEASUREMENT; TRANSFER FUNCTIONS;

SCANNING;

EID: 84862301307     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.922435     Document Type: Conference Paper

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