Binary pseudo-random gratings and arrays for calibration of the modulation transfer function of surface profilometers: Recent developments

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7448, Issue , 2009, Pages

  Barber, Samuel K ^a   Soldate, Paul ^b   Anderson, Erik H ^a   Cambie, Rossana ^a   Marchesini, Stefano ^a   Mckinney, Wayne R ^a   Takacs, Peter Z ^c   Voronov, Dmitriy L ^a   Yashchuk, Valeriy V ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b RENSSELAER POLYTECHNIC INSTITUTE   (United States)

^c BROOKHAVEN NATIONAL LABORATORY   (United States)

Author keywords

Calibration; Error reduction; Fabrication tolerances; Interferometric microscope; Metrology of X ray optics; Modulation transfer function; MTF; Power spectral density; PSD; Surface metrology; Surface profilometer

Indexed keywords

ERROR REDUCTION; FABRICATION TOLERANCES; INTERFEROMETRIC MICROSCOPE; METROLOGY OF X-RAY OPTICS; MODULATION TRANSFER FUNCTION; MTF; PSD; SURFACE METROLOGY; SURFACE PROFILOMETER;

CALIBRATION; FABRICATION; FUNCTIONS; INTERFEROMETRY; MICROSCOPES; MODULATION; OPTICAL TRANSFER FUNCTION; POWER SPECTRAL DENSITY; PROFILOMETRY; PULSE SHAPING CIRCUITS; TRANSFER FUNCTIONS;

TWO DIMENSIONAL;

EID: 70449477635     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.825389     Document Type: Conference Paper

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