Binary pseudo-random gratings and arrays for calibration of modulation transfer functions of surface profilometers

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 616, Issue 2-3, 2010, Pages 172-182

  Barber, Samuel K ^a   Anderson, Erik D ^a   Cambie, Rossana ^a   McKinney, Wayne R ^a   Takacs, Peter Z ^b   Stover, John C ^c   Voronov, Dmitriy L ^a   Yashchuk, Valeriy V ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b BROOKHAVEN NATIONAL LABORATORY   (United States)

^c Scatter Works Inc   (United States)

Author keywords

Interferometric microscope; Modulation transfer function; MTF; Power spectral density; PSD; Spatial resolution; Surface metrology; Surface profilometer

Indexed keywords

INTERFEROMETRIC MICROSCOPE; MODULATION TRANSFER FUNCTION; SPATIAL RESOLUTION; SURFACE METROLOGY; SURFACE PROFILOMETERS;

CALIBRATION; IMAGE RESOLUTION; INTERFEROMETRY; MAMMOGRAPHY; METEOROLOGICAL INSTRUMENTS; MICROSCOPES; MODULATION; OPTICAL TESTING; OPTICAL TRANSFER FUNCTION; PHOTORESISTS; POWER SPECTRAL DENSITY; PROFILOMETRY; SURFACE ROUGHNESS; TRANSFER FUNCTIONS;

TWO DIMENSIONAL;

EID: 77950819414     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2009.11.046     Document Type: Article

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