Characterization of a traceable profiler instrument for areal roughness measurement

Measurement Science and Technology

Volumn 22, Issue 9, 2011, Pages

  Thomsen Schmidt, P ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

areal roughness measurement; calibration of depth setting standards; calibration of roughness standards; tactile measurement; traceable profiler

Indexed keywords

ACTUATORS; BEARINGS (MACHINE PARTS); CALIBRATION; COMPUTER PROGRAMMING LANGUAGES; DATA ACQUISITION; INTERFEROMETERS;

AUTOMATED PROCEDURES; CONTACT STYLUS INSTRUMENTS; INDEPENDENT MEASUREMENT; INDUCTIVE MEASUREMENT; PHYSIKALISCH-TECHNISCHE BUNDESANSTALT; REAL TIME DATA ACQUISITION; ROUGHNESS STANDARDS; TRACEABLE PROFILER;

ROUGHNESS MEASUREMENT;

EID: 80051679645     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/22/9/094019     Document Type: Article

References (6)

1. VDI 2010 Optical measurement of microtopography, calibration of interference microscopes and depth setting standards for roughness measurement VDI/VDE-Handbuch Produktionstechnik und Fertigungsverfahren, Band 3: Betriebsmittel VDI/VDE-Richtlinie 2655 Part 1.1
2. Krüger-Sehm R, Brand U and Greve M 2003 Depth setting standards and an interference microscope for a measurement range up to 100 μm Proc. 9th Int. Conf. on Metrology and Properties of Engineering Surfaces (Halmstad, 10-11 September 2003) pp 204-14
3. Richtlinie DKD-R 4-2 Kalibrieren von Messgeräten und Normalen für die Rauheitsmesstechnik: Blatt 1 und 2 Ausgabe 11/2007
4. Description of the force standard Type FS-C SiMETRICS GmbH, Am Südhang 5, 09212 Limbach-Oberfrohna http://www.simetrics.de
5. Stout K J, Sullivan P J, Dong W P, Mainsah E, Lou N, Mathia T and Zahouani H 1993 The development of methods for the characterisation of roughness in three dimensions Report EUR 15178 EN EC Brussels
6. ISO 2001 Geometrical product specifications (GPS) - surface texture: profile method; Measurement standards - part 2: software measurement standards ISO 5436-2 International Organization for Standardization