Binary pseudo-random grating as a standard test surface for measurement of modulation transfer function of interferometric microscopes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6704, Issue , 2007, Pages

  Yashchuk, Valeriy V ^a   McKinney, Wayne R ^a   Takacs, Peter Z ^b  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b BROOKHAVEN NATIONAL LABORATORY   (United States)

Author keywords

Calibration; Error reduction; Interferometric microscope; Modulation transfer function; Optical metrology; Power spectral density; Standard test surface

Indexed keywords

OPTICAL TRANSFER FUNCTION; OPTICS; POWER SPECTRAL DENSITY; PROBLEM SOLVING; RANDOM PROCESSES;

ERROR REDUCTION; INTERFEROMETRIC MICROSCOPE; OPTICAL METROLOGY; STANDARD TEST SURFACE;

DIFFRACTION GRATINGS;

EID: 42149123487     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.732557     Document Type: Conference Paper

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