Signal modeling for low-coherence height-scanning interference microscopy

Applied Optics

Volumn 43, Issue 25, 2004, Pages 4821-4830

  De Groot, Peter ^a   De Lega, Xavier Colonna ^a  

^a ZYGO CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; COHERENT LIGHT; FOURIER TRANSFORMS; INTERFEROMETERS; MICROSCOPIC EXAMINATION; NATURAL FREQUENCIES; SIGNAL PROCESSING; THIN FILMS;

INTERFERENCE MICROSCOPY; PEAK FRINGE CONTRAST; SIGNAL MODELING;

INTERFEROMETRY;

EID: 4544294406     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.43.004821     Document Type: Article

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