Stability of modulation transfer function calibration of surface profilometers using binary pseudo-random gratings and arrays with nonideal groove shapes

Optical Engineering

Volumn 49, Issue 5, 2010, Pages

  Barber, Samuel K ^a   Anderson, Erik H ^a   Cambie, Rossana ^a   Marchesini, Stefano ^a   McKinney, Wayne R ^a   Takacs, Peter Z ^b   Vorornov, Dmitry L ^a   Yashchuk, Valeriy ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b BROOKHAVEN NATIONAL LABORATORY   (United States)

Author keywords

calibration; fabrication tolerances; interferometric microscope; metrology of x ray optics; modulation transfer function; power spectral density; surface metrology; surface profilometer

Indexed keywords

FABRICATION TOLERANCES; INTERFEROMETRIC MICROSCOPE; POWER SPECTRAL; SURFACE METROLOGY; SURFACE PROFILOMETER;

CALIBRATION; FABRICATION; INTERFEROMETRY; MODULATION; POWER SPECTRAL DENSITY; PROFILOMETRY; SPECTRAL DENSITY; UNITS OF MEASUREMENT;

OPTICAL TRANSFER FUNCTION;

EID: 81355132871     PISSN: 00913286     EISSN: 15602303     Source Type: Journal    
DOI: 10.1117/1.3431659     Document Type: Article

References (25)

1. L. Assoufid, O. Hignette, M. Howells, S. C. Irick, H. Lammert, and P. Z. Takacs, "Future metrology needs for synchrotron radiation grazing-incidence optics," Nucl. Instrum. Method A 467-468, 267- 270 (2001). (Pubitemid 32748923)
2. P. Z. Takacs, "X-ray mirror metrology," in Handbook of Optics, 3rd ed., Vol. V, M. Bass, Ed., Chapter 46, McGraw-Hill, New York (2009).
3. G. D. Boreman, Modulation Transfer Function in Optical and Electro-optical Systems, SPIE Press, Bellingham, WA (2001).
4. R. N. Bracewell, The Fourier Transform and Its Applications, McGraw-Hill, New York (1986).
5. V. V. Yashchuk, A. D. Franck, S. C. Irick, M. R. Howells, A. A. MacDowell, and W. R. McKinney, Two-dimensional power spectral density measurements of x-ray optics with the MicroMap interferometric microscope, Proc. SPIE 5858, 58580A (2005).
6. V. V. Yashchuk, S. C. Irick, E. M. Gullikson, M. R. Howells, A. A. MacDowell, W. R. McKinney, F. Salmassi, and T. Warwick, "Crosscheck of different techniques for two dimensional power spectral density measurements of x-ray optics," Proc. SPIE 5921, 59210G (2005).
7. V. V. Yashchuk, E. M. Gullikson, M. R. Howells, S. C. Irick, A. A. MacDowell, W. R. McKinney, F. Salmassi, T. Warwick, J. P. Metz, and T. W. Tonnessen, "Surface roughness of stainless-steel mirrors for focusing soft x rays," Appl. Opt. 45(20), 48334842 (2006).
8. E. L. Church, H. A. Jenkinson, and J. M. Zavada, "Relationship between surface scattering and microtopographic features," Opt. Eng. 18(2), 125-136 (1979). (Pubitemid 9469583)
9. J. C. Stover, Optical Scattering, 2nd ed., SPIE Press, Bellingham, WA (1995).
10. D. Attwood, Soft X-rays and Extreme Ultraviolet Radiation, Cambridge University Press, New York (1999).
11. G. D. Boreman and S. Yang, "Modulation transfer function measurement using three- and four-bar targets," Appl. Opt. 34, 8050-8052 (1995).
12. R. Barakat, "Determination of the optical transfer function directly from the edge spread function," J. Opt. Soc. Am. 55, 1217-1219 (1965).
13. B. Tatian, "Method for obtaining the transfer function from the edge response function," J. Opt. Soc. Am. 55, 1014-1019 (1965).
14. P. Z. Takacs, M. X. Li, K. Furenlid, and E. L. Church, "Step-height standard for surface-profiler calibration," Proc. SPIE 1995, 235-244 (1993).
15. A. Daniels, G. D. Boreman, A. Ducharme, and E. Sapir, "Random transparency targets for modulation transfer function measurement in the visible and IR," Opt. Eng. 34, 860-868 (1995).
16. V. V. Yashchuk, W. R. McKinney, and P. Z. Takacs, "Binary pseudorandom grating standard for calibration of surface profilometers, " Opt. Eng. 47(7), 073602 (2008).
17. V. V. Yashchuk, W. R. McKinney, and P. Z. Takacs, "Binary pseudorandom grating as a standard test surface for measurement of modulation transfer function of interferometric microscopes, " Proc. SPIE 6704, 670408 (2007).
18. S. K. Barber, P. Soldate, E. D. Anderson, R. Cambie, W. R. McKinney, P. Z. Takacs, D. L. Voronov, and V. V. Yashchuk, "Development of pseudo-random binary gratings and arrays for calibration of surface profile metrology tools," J. Vac. Sci. Technol. B 27(6), 3213-3219 (2009).
19. S. K. Barber, E. D. Anderson, R. Cambie, W. R. McKinney, P. Z. Takacs, J. C. Stover, D. L. Voronov, and V. V. Yashchuk, "Binary pseudo-random gratings and arrays for calibration of modulation transfer function of surface profilometers," Nucl. Instrum. Methods Phys. Res. A 616, 172-182 (2009).
20. R. H. Dicke, "Scatter-hole cameras for X-rays and gamma rays," Astrophys. J. 153, L101-L106 (1968).
21. J. G. Ables, "Fourier transform photography: a new method for x-ray astronomy," in Proc. of Astronom. Soc. of Australia, Vol. 1, pp. 172- 173, Sydney University Press, Sydney (1968).
22. E. E. Fenimore and T. M. Cannon, "Coded aperture imaging with uniformly redundant arrays," Appl. Opt. 17(3), 337-347 (1978). (Pubitemid 8588951)
23. P. H. Bardell, W. H. McAnney, and J. Savir, Built-in Test for VLSI Pseudorandom Techniques, Wiley, Hoboken, NJ (1987).
24. S. Marchesini, S. Boutet, A. E. Sakdinawat, M. J. Bogan, S. Bajt, A. Barty, H. N. Chapman, M. Frank, S. P. Hau-Riege, A. Szöke, C. Cui, D. A. Shapiro, M. R. Howells, J. C. H. Spence, J. W. Shaevitz, J. Y. Lee, J. Hajdu, and M. M. Seibert, "Massively parallel x-ray holography," Nat. Photonics 2, 560-563 (2008).
25. E. L. Church, "Fractal surface finish," Appl. Opt. 27(8), 1518-1526 (1988).