Calibration of the geometrical characteristics of areal surface topography measuring instruments

Journal of Physics: Conference Series

Volumn 311, Issue 1, 2011, Pages

  Giusca, C L ^a,b   Leach, R K ^a   Helery, F ^c   Gutauskas, T ^d  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

^b UNIVERSITY OF HUDDERSFIELD   (United Kingdom)

^c ARTS ET MÉTIERS PARISTECH   (France)

^d IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; INTERFEROMETERS; LASER INTERFEROMETRY; SURFACE MEASUREMENT; TOPOGRAPHY; UNITS OF MEASUREMENT;

AREAL SURFACE TOPOGRAPHIES; GEOMETRICAL CHARACTERISTICS; INTERNATIONAL STANDARDS; LASER INTERFEROMETER; MEASURING INSTRUMENTS; METROLOGICAL CHARACTERISTICS; SCANNING CONFOCAL MICROSCOPES; SCANNING INTERFEROMETERS;

SURFACE TOPOGRAPHY;

EID: 80053894877     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/311/1/012005     Document Type: Conference Paper

References (18)

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