Nanoscale Calibration Standards and Methods: Dimensional and Related Measurements in the Micro- and Nanometer Range

Nanoscale Calibration Standards and Methods: Dimensional and Related Measurements in the Micro- and Nanometer Range

Volumn , Issue , 2006, Pages 1-519

  Wilkening, Günter ^a   Koenders, Ludger ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

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EID: 84889629724     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/3527606661     Document Type: Book

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