Development and characterization of a new instrument for the traceable measurement of areal surface texture

Measurement Science and Technology

Volumn 20, Issue 12, 2009, Pages

  Leach, Richard K ^a   Giusca, Claudiu L ^a,b   Naoi, Kazuya ^c  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

^b UNIVERSITY OF HUDDERSFIELD   (United Kingdom)

^c NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Areal surface texture; Interferometry; Monte Carlo simulation; Surface texture measurement; Traceability

Indexed keywords

AIR BEARING; AREAL SURFACE TEXTURE; ELECTROMAGNETIC SYSTEMS; ERROR MOTION; MANUFACTURING INDUSTRIES; MEASURING INSTRUMENTS; MONTE CARLO APPROACH; MONTE CARLO SIMULATION; NEW INSTRUMENT; PLANE MIRRORS; PROBING SYSTEM; SCANNING INTERFEROMETERS; SURFACE MANUFACTURING; SURFACE TEXTURE MEASUREMENT; SURFACE TEXTURES; TWO-AXIS;

ASPHALT PAVEMENTS; BEARINGS (STRUCTURAL); INSTRUMENTS; INTERFEROMETERS; MONTE CARLO METHODS; SLIDEWAYS; SURFACE STRUCTURE; TEXTURES; THREE DIMENSIONAL;

INTERFEROMETRY;

EID: 72149100737     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/20/12/125102     Document Type: Article

References (23)

1. Bayliss D, Leach R K and Hall M 2006 Development of an electromagnetic spring for use with high accuracy surface texture measuring probe NPL Report DEPC-EM 006
2. Birch K P and Downs M J 1994 Correction to the updated Edlén equation for the refractive index of air Metrologia 31 315-6
3. Blunt L A and Jiang X 2003 Advanced Techniques for Assessment Surface Topography (London: Kogan Page Science)
4. Bruzzone A A G, Costa H L, Leonardo P M and Lucca D A 2008 Advances in engineering surfaces for functional performance CIRP Ann. 57 750-69
5. Downs M J, Birch K P, Cox M G and Nunn J W 1995 Verification of a polarization-insensitive optical interferometer system with subnanometric capability Precis. Eng. 17 1-6
6. Downs M J and Nunn J W 1998 Verification of the sub-nanometric capability of an NPL differential plane mirror interferometer with a capacitance probe Meas. Sci. Technol. 9 1437-40
7. Evans C J and Bryan J B 1999 Structured textured or engineered surfaces CIRP Ann. 48 541-56
8. Forbes A B and Leach R K 2005 Self-calibration of a novel surface texture measuring instrument Proc. LAMBDMAP (Cranfield, UK) pp 276-85
9. Giusca C L, Leach R K and Forbes A B 2009 Uncertainty evaluation for a new traceable areal surface texture measuring instrument 12th Int. Conf. on Metrology and Properties of Engineered Surfaces (8-9 June, Rzeszow, Poland) pp 37-42
10. Haycocks J A, Jackson K, Leach R K, Garratt J, MacDonnell I, Rubert P, Lamb J and Wheeler S 2005 Tackling the challenge of traceable surface texture measurement in three dimensions Proc. 5th Int. Euspen Conf. (May, Turin, Italy) pp 253-6
11. Hughes E B and Oldfield S 2003 Traceable, high accuracy thrust measurement for electric propulsion 3rd Int. Electric Propulsion Conf. (Toulouse, France)
12. ISO5436-1 2000 Geometrical product specifications (GPS)-surface texture: profile method; measurement standards-part 1. Material measures (Geneva: International Organization for Standardization)
13. Kaye G-W and Laby T H 1995 Tables of Physical and Chemical Constants 16th edn (London: Longman) www.kayelaby.npl.co.uk
14. Leach R K 1999 Calibration, traceability and uncertainty issues in surface texture metrology NPL Report CLM 7
15. Leach R K 2000 Traceable measurement of surface texture at the National Physical Laboratory using NanoSurf IV Meas. Sci. Technol. 11 1162-73
16. Leach R K 2009 Fundamental Principles of Engineering Nanometrology (Amsterdam: Elsevier)
17. Leach R K and Haitjema H 2009 Bandwidth limitations and comparisons of surface texture measuring instruments Meas. Sci. Technol. submitted
18. Mattsson L et al 2008 How reliable are surface roughness measurements of micro-features?-Experiences of a round robin test within nine 4M laboratories Proc. 4th 4M Conf. (September, Cardiff, UK) pp 139-42
19. Raine K W and Downs M J 1978 Beam-splitter coatings for producing phase quadrature interferometer outputs Opt. Acta 25 549-58
20. Rhee H G, Vorburger T V, Lee J W and Fu J 2005 Discrepancies between roughness measurements obtained with phase-shifting and white-light interferometry Appl. Opt. 44 5919-27
21. Thomsen-Schmidt P and Krüger-Sehm R 2008 Calibration of an electromagnetic force compensation system Proc. XII Int. Colloq. Surf. (28-29 January, Chemnitz, Germany) pp 323-7
22. Yacoot A and Downs M J 2000 The use of x-ray interferometry to investigate the linearity of the NPL differential plane mirror optical interferometer Meas. Sci. Technol. 11 1126-30
23. Zygo Corporation 1993 Zygo 2/20 Integrated Interferometer System Reference Manual OMP-0229B (Middle Field, CT: Zygo Corp.)