Two dimensional power spectral density measurements of X-ray optics with the Micromap interferometric microscope

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5858, Issue , 2005, Pages 1-12

  Yashchuk, Valeriy V ^a   Franck, Andrew D ^a   Irick, Steve C ^a   Howells, Malcolm R ^a   MacDowell, Alastair A ^a   McKinney, Wayne R ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

Interferometric microscope; Optical metrology; Power spectral density; X ray optics

Indexed keywords

ANISOTROPY; COMPUTER SOFTWARE; INTERFEROMETERS; MATHEMATICAL MODELS; OPTICAL TRANSFER FUNCTION; SPECTRUM ANALYSIS; X RAYS;

INTERFEROMETRIC MICROSCOPE; OPTICAL METROLOGY; POWER SPECTRAL DENSITY; X-RAY OPTICS;

OPTICAL VARIABLES MEASUREMENT;

EID: 28844450744     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.612383     Document Type: Conference Paper

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