Problems associated with the calibration of optical probe based topography instruments

Measurement: Journal of the International Measurement Confederation

Volumn 17, Issue 3, 1996, Pages 173-181

  Mainsah, E ^a   Dong, W P ^b   Stout, K J ^c  

^a Faculty of Engineering and Computing   (United Kingdom)

^b UNIVERSITY OF CONNECTICUT   (United States)

^c UNIVERSITY OF BIRMINGHAM   (United Kingdom)

Author keywords

3 D topography; Calibration; Optical instruments; Surface metrology

Indexed keywords

ALGORITHMS; CALIBRATION; OPTICAL SENSORS; PROBES; SURFACE MEASUREMENT; THREE DIMENSIONAL;

CIRCLE FITTING ALGORITHMS; TOPOGRAPHY;

OPTICAL INSTRUMENTS;

EID: 0030108679     PISSN: 02632241     EISSN: None     Source Type: Journal    
DOI: 10.1016/0263-2241(96)00023-1     Document Type: Article

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