Traceable calibration standard for the lateral axis of contact stylus instruments

Wear

Volumn 257, Issue 12 SPEC.ISS., 2004, Pages 1241-1245

  Kruger Sehm R ^a   Haßler Grohne W ^a   Fruhauf J ^b  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; INSTRUMENT; STANDARD;

EID: 10044284094     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.wear.2004.03.047     Document Type: Conference Paper

References (12)

1. J. Frühauf, S. Krönert, U. Brand, Tiefen- und Längennormale aus Silizium Technisches Messen 68 (7-8) (2001) 326-332.
2. J. Frühauf, H. Trumpold, Silicon Standards for assessment and calibration of stylus probes, Ann. CIRP 51 (1) (2002) 475-478.
3. J. Frühauf, Problems of contour measuring on microstructures using a surface profiler, Meas. Sci. Technol. 9 (1998) 293-296.
4. C. Bläsing-Bangert, H. Feindt, U. Götz, Das Maskenvermessungssystem Leitz LMS 2000 als Lösung für die hohen Anforderungen der Halbleiterindustrie, Teil 2: Aufbau und Arbeitsweise des Meßsystems LMS 2000, Mitt. f. Wiss. u Technik Band 10 (2) (1991) S38-S45.
5. ISO 3274: Geometrical Product Specifications (GPS) - Surface texture: Profile method: nominal characteristics of contact stylus instruments.
6. ISO 5436-1: Geometrical Product Specifications (GPS) - Surface texture: Profile method: Measurement standards - Part 1: material measures.
7. ISO 4287: Geometrical Product Specifications (GPS) - Surface texture: Profile method - terms, definitions and surface texture parameters.
8. ISO 4288: Geometrical Product Specifications (GPS) - Surface texture: Profile method: rules and procedures for the assessment of surface texture.
9. ISO 12179: Geometrical Product Specifications (GPS) - Surface texture: Profile method - calibration of contact (stylus) instruments.
10. SEP 1940: Messung von Ra und RPc an kaltgewalzten Flacherzeugnissen aus Stahl, equivalent to EN 10049: Measurement of Ra and RPc on metallisc flat products with stochastic surface texture.
11. GUM: Guide to the expression of uncertainty in measurement, ISO, Genf, 1995.
12. R. Krüger-Sehm, PTB, Working 5.16, Roughness measurement systems, Bundesallee, Germany.