Orientation control of large-grained si films on insulators by thickness-modulated al-induced crystallization

Crystal Growth and Design

Volumn 13, Issue 4, 2013, Pages 1767-1770

  Numata, Ryohei ^a   Toko, Kaoru ^a   Saitoh, Noriyuki ^b   Yoshizawa, Noriko ^b   Usami, Noritaka ^c   Suemasu, Takashi ^a  

^a UNIVERSITY OF TSUKUBA   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^c TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AL-INDUCED CRYSTALLIZATIONS; AMORPHOUS SI FILMS; ELECTRON BACKSCATTERING DIFFRACTION; HETEROGENEOUS NUCLEATION; LOW TEMPERATURES; ORIENTATION CONTROL; POLYCRYSTALLINE-SI; THIN-FILM SOLAR CELLS;

ALUMINUM; AMORPHOUS FILMS; EPITAXIAL FILMS; SILICON;

AMORPHOUS SILICON;

EID: 84875794436     PISSN: 15287483     EISSN: 15287505     Source Type: Journal    
DOI: 10.1021/cg4000878     Document Type: Article

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