Large-grained poly-Si films on ZnO:Al coated glass substrates

Thin Solid Films

Volumn 516, Issue 20, 2008, Pages 6869-6872

  Lee, K Y ^a   Muske, M ^a   Gordon, I ^b   Berginski, M ^c   D'Haen, J ^b   Hupkes J ^c   Gall, S ^a   Rech, B ^a  

^a HAHN MEITNER INSTITUT   (Germany)

^b IMEC   (Belgium)

^c FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

Aluminium induced layer exchange; Preferential (001) orientation; ZnO:Al coated glass

Indexed keywords

ALUMINUM; ALUMINUM CLADDING; AMORPHOUS MATERIALS; AMORPHOUS SILICON; ANNEALING; GLASS; LIGHT METALS; MICROSCOPES; POLYSILICON; SEMICONDUCTING ZINC COMPOUNDS; STEEL ANALYSIS; THICK FILMS; THIN FILMS; ZINC ALLOYS; ZINC OXIDE;

(1 1 1) ORIENTATION; (E ,3E) PROCESS; ALUMINIUM-INDUCED LAYER EXCHANGE (ALILE); ANNEALING PROCESSING; ANNEALING TEMPERATURE (TA); AVERAGE GRAIN SIZES; COATED GLASS; COATED GLASS SUBSTRATES; ELSEVIER (CO); HIGH QUALITY (HQ); OPTICAL MICROSCOPE (OM); POLY-SI; POLY-SI FILMS; RAMAN MEASUREMENTS; THIN FILM POLYCRYSTALLINE SILICON;

SILICON;

EID: 45849087328     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.12.128     Document Type: Article

References (13)

1. Rau B., Sieber I., Schneider J., Muske M., Stöger-Pollach M., Schattschneider P., Gall S., and Fuhs W. J. Cryst. Growth 270 (2004) 396
2. Van Gestel D., Gordon I., Carnel L., Van Nieuwenhuysen K., D'Haen J., Irigoyen J., Beaucarne G., and Poortmans J. Thin Solid Films 511/512 (2006) 35
3. Nast O., Puzzer T., Koschier L.M., Sproul A.B., and Wenham S.R. Appl. Phys. Lett. 73 (1998) 3214
4. Schneider J., Schneider A., Sarikov A., Klein J., Muske M., Gall S., and Fuhs W. J. Non-Cryst. Solids 352 (2006) 972
5. Muller J., Rech B., Springer J., and Vanecek M. Sol. Energy 77 (2004) 917
6. Kluth O., Schöpe G., Hüpkes J., Agashe C., Mueller J., and Rech B. Thin Solid Films 442 (2003) 80
7. Rech B., Repmann T., van den Donker M.N., Berginski M., Kilper T., Hüpkes J., Calnan S., Stiebig H., and Wieder S. Thin Solid Films 511/512 (2006) 548
8. Dimova-Malinovska D., Angelov O., Kamenova M., Vaseashta A., and Pivin J.C. J. Optoelectron. Adv. Mater. 9 (2007) 355
9. Gall S., Schneider J., Muske M., Sieber I., Nast O., and Fuhs W. Proc. of PV in Europe--From PV Technology to Energy Solutions, Rome, Italy (2002) 87
10. Berginski M., Rech B., Hüpkes J., Schöpe G., van den Donker M.N., Reetz W., Kilper T., and Wuttig M. Proc. 21st European Photovoltaic Solar Energy Conference, Dresden, Germany (September 4-8 2006) 1539
11. Hamad O., Braunstein G., Patil H., and Dhere N. Thin Solid Films 489 (2005) 303
12. Kim H., Kim D., Lee G., Kim D., and Lee S.H. Sol. Energy Mater. Sol. Cells 74 (2002) 323
13. Gall S., Schneider J., Klein J., Hübener K., Muske M., Rau B., Conrad E., Sieber I., Petter K., Lips K., Stöger-Pollach M., Schattschneider P., and Fuhs W. Thin Solid Films 511/512 (2006) 7