Polycrystalline silicon thin-film transistors on quartz fiber

Applied Physics Letters

Volumn 91, Issue 20, 2007, Pages

  Sugawara, Yuta ^a   Uraoka, Yukiharu ^a   Yano, Hiroshi ^a   Hatayama, Tomoaki ^a   Fuyuki, Takashi ^a   Nakamura, Toshihiro ^b   Toda, Sadayuki ^b   Koaizawa, Hisashi ^b   Mimura, Akio ^c   Suzuki, Kenkichi ^c  

^a NARA INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

^b FURUKAWA ELECTRIC CO LTD   (Japan)

^c NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; EXCIMER LASERS; FIBERS; MICROELECTRONICS; POLYSILICON; QUARTZ;

MICROELECTRONIC DEVICES; QUARTZ FIBERS;

THIN FILM TRANSISTORS;

EID: 36248979712     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2815925     Document Type: Article

References (5)

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4. T. Sameshima, S. Usui, and M. Sekiya, IEEE Electron Device Lett. 7, 276 (1986).
5. G. E. Possin, H. G. Parks, S.-W. Chiang, and Y. S. Liu, IEEE Trans. Electron Devices ED-31, 68 (1984).