Control of a two-axis micromanipulator-based scanning probe system for 2.5-D nanometrology

IEEE/ASME Transactions on Mechatronics

Volumn 15, Issue 5, 2010, Pages 661-670

  Jayanth, G R ^a   Menq, Chia Hsiang ^a  

^a The Ohio State University   (United States)

Author keywords

2.5 D nanometrology; magnetic actuation; two axis compliant micromanipulator; two axis probing system

Indexed keywords

MAGNETIC ACTUATION; NANOMETROLOGY; PROBING SYSTEM; TWO-AXIS; TWO-AXIS PROBING SYSTEM;

ATOMIC FORCE MICROSCOPY; FLIGHT CONTROL SYSTEMS; MICROMANIPULATORS; PROBES; TOOLS;

SCANNING;

EID: 77955448189     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2009.2031595     Document Type: Article

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