Tracking control of a nanopositioner using complementary sensors

IEEE Transactions on Nanotechnology

Volumn 8, Issue 1, 2009, Pages 55-65

  Mahmood, Iskandar A ^a   Moheimani, S O Reza ^a   Liu, Kexiu ^a  

^a UNIVERSITY OF NEWCASTLE   (Australia)

Author keywords

Piezoelectric tube canner; Scanning probe microscopes (SPMs); Two sensor based H controller

Indexed keywords

ACTUATORS; BANDWIDTH; CONTROLLERS; FEEDBACK; FEEDBACK CONTROL; PIEZOELECTRIC ACTUATORS; PIEZOELECTRICITY; PROBES; SCANNING; SCANNING TUNNELING MICROSCOPY; TELECOMMUNICATION SYSTEMS;

ATOMIC FORCE AND SCANNING TUNNELING MICROSCOPIES; CAPACITIVE SENSORS; CLOSED-LOOP BANDWIDTHS; COMPLEMENTARY-SENSORS; CONTROL TECHNIQUES; DISPLACEMENT SIGNALS; FEEDBACK CONTROLLERS; HIGH FREQUENCIES; LOW FREQUENCIES; NANO POSITIONERS; NANO-POSITIONING; NANOSCALE POSITIONING; NOISE LEVELS; PIEZOELECTRIC TUBE CANNER; POSITIONING ACCURACIES; RMS NOISE; SCANNING PROBE MICROSCOPES (SPMS); SENSOR NOISE; SENSOR-BASED CONTROLS; STRAIN DISPLACEMENTS; STRAIN SIGNALS; SUBNANOMETER; THREE ORDERS OF MAGNITUDES; TRACKING CONTROLS;

SENSORS;

EID: 59049096369     PISSN: 1536125X     EISSN: None     Source Type: Journal    
DOI: 10.1109/TNANO.2008.2005183     Document Type: Article

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