Modeling and design of a magnetically actuated two-axis compliant micromanipulator for nanomanipulation

IEEE/ASME Transactions on Mechatronics

Volumn 15, Issue 3, 2010, Pages 360-370

  Jayanth, G R ^a   Menq, Chia Hsiang ^a  

^a Ohio State University   (United States)

Author keywords

Actuators; Atomic force microscope (AFM); Manipulators

Indexed keywords

ATOMIC FORCE MICROSCOPE (AFM); ATOMIC FORCE MICROSCOPES; DEVELOPED MODEL; FINITE ELEMENT ANALYSIS; LONGITUDINAL AXIS; LUMPED PARAMETER MODELS; MODELING AND SIMULATION; NANOMANIPULATIONS; QUASI-STATIC; TWO-AXIS;

ACTUATORS; ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; DESIGN; FINITE ELEMENT METHOD; LONGITUDINAL CONTROL; MICROMANIPULATORS; MICROSCOPES; PROBES;

ATOMS;

EID: 77950916711     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2009.2026170     Document Type: Article

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