Towards automated nanoassembly with the atomic force microscope: A versatile drift compensation procedure

Journal of Dynamic Systems, Measurement and Control, Transactions of the ASME

Volumn 131, Issue 6, 2009, Pages 1-8

  Krohs, Florian ^a   Onal, Cagdas ^b   Sitti, Metin ^b   Fatikow, Sergej ^a  

^a UNIVERSITY OF OLDENBURG   (Germany)

^b CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON NANOTUBES; MICROMANIPULATORS; MONTE CARLO METHODS; NUCLEIC ACIDS; YARN;

AFM-BASED NANOMANIPULATION; DRIFT COMPENSATION; HUMAN INTERVENTION; MECHANICAL LITHOGRAPHY; MONTE CARLO LOCALIZATION; NANOMANIPULATIONS; SPATIAL DISPLACEMENT; SPATIAL UNCERTAINTY;

AUTOMATION;

EID: 77955912863     PISSN: 00220434     EISSN: 15289028     Source Type: Journal    
DOI: 10.1115/1.4000139     Document Type: Article

References (18)

1. Schaefer, D. M., Reifenberger, R., Patil, A., and Andres, R. P., 1995, "Fabrication of Two-Dimensional Arrays of Nanometer-Size Clusters With The Atomic Force Microscope," Appl. Phys. Lett., 66(8), pp. 1012-1014.
2. Dellagiovanna, M., Yoshioka, H., Miyashita, H., Murai, S., Nakaue, T., Takaoka, O., Uemoto, A., Kikuchi, S., Hagiwara, R., and Benard, S., 2007, "A Semi-Automated AFM Photomask Repair Process for Manufacturing Application Using SPR6300," Proc. SPIE, 6730, p. 673020.
3. Nelson, B. A., King, W. P., Laracuente, A. R., Sheehan, P. E., and Whitman, L. J., 2006, "Direct Deposition of Continuous Metal Nanostructures by Thermal Dip-Pen Nanolithography," Appl. Phys. Lett., 88(3), p. 033104.
4. Rubio-Sierra, F. J., Heckl, W. M., and Stark, R. W., 2005, "Nanomanipulation by Atomic Force Microscopy," Adv. Eng. Mater., 7(4), pp. 193-196.
5. Fearing, R. S., 1995, "Survey of Sticking Effects for Micro Parts Handling," IROS '95: Proceedings of the International Conference on Intelligent Robots and Systems, IEEE Computer Society, Vol. 2, pp. 212-217.
6. Sitti, M., 2007, "Microscale and Nanoscale Robotics Systems," IEEE Rob. Autom. Mag., 14(1), pp. 53-60.
7. Chen, H., Xi, N., and Li, G., 2006, "CAD-Guided Automated Nanoassembly Using Atomic Force Microscopy-Based Nonrobotics," IEEE. Trans. Autom. Sci. Eng., 3, pp. 208-217.
8. Mokaberi, B., Yun, J., Wang, M., and Requicha, A. A. G., 2007, " Automated Nanomanipulation With Atomic Force Microscopes,"Proceedings on IEEE International Conference on Robotics & Automation (ICRA '07).
9. Mokaberi, B., and Requicha, A. A. G., 2008, " Compensation of Scanner Creep and Hysteresis for AFM Nanomanipulation,"IEEE. Trans. Autom. Sci. Eng., 5(2), pp. 197-206.
10. Mokaberi, B., and Requicha, A. A. G., 2006, " Drift Compensation for Automatic Nanomanipulation With Scanning Probe Microscopes,"IEEE. Trans. Autom. Sci. Eng., 3(3), pp. 199-207.
11. Schitter, G., Allgöwer, F., and Stemmer, A., 2004, " A New Control Strategy for High-Speed Atomic Force Microscopy,"Nanotechnology, 15(1), pp. 108-114.
12. Li, Y., and Bechhoefer, J., 2007, " Feedforward Control of a Closed-Loop Piezoelectric Translation Stage for Atomic Force Microscope,"Rev. Sci. Instrum., 78(1), pp. 013702.
13. Tranvouez, E., Boer-Duchemin, E., Comtet, G., and Dujardin, G., 2007, " Active Drift Compensation Applied to Nanorod Manipulation With an Atomic Force Microscope,"Rev. Sci. Instrum., 78, pp. 115103.
14. Fox, D., Burgard, W., Dellaert, F., and Thrun, S., 1999, " Monte Carlo Localization: Efficient Position Estimation for Mobile Robots,"Proceedings of the 16th National Conference on Artificial Intelligence (AAAI'99).
15. Thrun, S., Burgard, W., and Fox, D., 2005, Probabilistic Robotics, MIT, Cambridge, MA.
16. Horcas, I., Fernández, R., Gómez-Rodríguez, J. M., Colchero, J., Gómez-Herrero, J., and Baro, A. M., 2007, " WSXM: A Software for Scanning Probe Microscopy and a Tool for Nanotechnology,"Rev. Sci. Instrum., 78(1), pp. 013705.
17. Baur, C., Gazen, B. C., Koel, B., Ramachandran, T. R., Requicha, A. A. G., and Zini, L., 1997, " Robotic Nanomanipulation With a Scanning Probe Microscope in a Networked Computing Environment,"J. Vac. Sci. Technol. B, 15(4), pp. 1577-1580.
18. Lapshin, R. V., 2007, " Automatic Drift Elimination in Probe Microscope Images Based on Techniques of Counter-Scanning and Topography Feature Recognition,"Meas. Sci. Technol., 18(3), pp. 907-927.